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A Novel Topology for Process Variation-Tolerant Piezoelectric Micromachined Ultrasonic Transducers
摘要： This paper presents a novel architecture for piezoelectric micromachined ultrasonic transducers (PMUT) allowing for a drastic reduction in the impact of process variations on the accuracy of the resonant frequency. At the core of this new topology is a toroidal anchoring technique. Measurement results show that inter- and intra-die resonant frequency standard variations can be reduced from 101 kHz to 23 kHz and from 20 kHz to 5.9 kHz, respectively, by using the method proposed in this paper, showcasing devices fabricated using the PiezoMUMPs commercial fabrication technology. From the 16 chips that have been fabricated, each holding 12 PMUT devices of two different topologies, resonant frequency results are presented and analyzed to assess the effectiveness of the proposed approach. In addition, as a proof of concept, the fabricated PMUT are demonstrated to perform distance ranging measurements.
关键词： frequency,ranging measurements,variability,process variation,MEMS,PMUT,Piezoelectric ultrasonic transducers,microfabrication
更新于2025-09-23 15:21:01
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[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - Fluid Density Sensing Using PMUTs
摘要： We present a novel method of monitoring liquid condition by tracking density which may find application in various micro as well as macro systems. It is based on transmission of ultrasound waves through liquids and employs Piezoelectric Micromachined Ultrasound Transducers (PMUTs) for actuation and reception. The PMUT-Fluid-PMUT (P-F-P) arrangement forms the entire system whose ability can be customized depending on the targeted application. In this article we discuss various aspects of making P-F-P system and experimentally show that P-F-P can be one of the most effective liquid condition monitoring systems in the near future.
关键词： Virtual added mass,PMUT,Density sensing
更新于2025-09-19 17:15:36
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[IEEE 2018 IEEE SENSORS - New Delhi, India (2018.10.28-2018.10.31)] 2018 IEEE SENSORS - Design and Fabrication of a Piezoelectric Micromachined Ultrasonic Transducer Array Based on Ceramic PZT
摘要： This paper presents a piezoelectric micromachined ultrasonic transducer (pMUT) array fabricated using high-piezoelectric-coefficient ceramic PZT wafers. A new process for polishing ceramic PZT layers down to 5 μm has been developed and applied for manufacturing high-sensitivity pMUTs. A 2 MHz working pMUT array (8×8 elements) based on ceramic PZT has been designed, modeled, fabricated and characterized.
关键词： pMUT,piezoelectric transducers,ultrasonic,micromachined transducers,ceramic PZT
更新于2025-09-19 17:15:36
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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Novel Mechanical Coupling Piezoelectric Micromachined Ultrasonic Transducers Based on Base Excitation System
摘要： This paper presented a novel piezoelectric micromachined ultrasonic transducer (PMUT) based on mechanical coupling between an annular diaphragm and a circular diaphragm stacking together. The circular diaphragm whose pedestal grounded on the middle of the annular diaphragm, which formed a base excitation system. Compared to the non-coupled traditional circular diaphragm PMUTs, the proposed PMUTs achieved higher transmission sensitivity by 173% with the resonant frequency of 6.14 MHz in water, due to the base excitation amplification of the circular diaphragm. Also, the array transmission performance of the proposed PMUT and non-coupled traditional PMUT with circular diaphragm was compared in the same array dimension. The results indicated that the array composed by the proposed PMUT had less cross-talk effect, which kept the central working frequency almost the same when it work solely.
关键词： mechanical coupling,PMUT,high transmission sensitivity,low cross-talk effect
更新于2025-09-19 17:15:36
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[IEEE 2019 IEEE International Ultrasonics Symposium (IUS) - Glasgow, United Kingdom (2019.10.6-2019.10.9)] 2019 IEEE International Ultrasonics Symposium (IUS) - PMUT-Enabled Underwater Acoustic Source Localization System
摘要： The present work presents the novel application of Piezoelectric Micromachined Ultrasonic Transducer (PMUT) arrays in an Underwater Acoustic Source Localization System. Based on the difference in the time of arrival of ultrasonic bursts originating from an acoustic beacon, the system is capable of determining the direction to the source with no theoretical limitation on the angular range. A cross correlation technique is used to estimate the time of arrival difference between the received signals. Experiments are performed with the prototype submerged in liquid in a tank for arbitrary positions of a beacon, showing large potential for application of the system in a miniaturized, integrated platform for underwater source localization.
关键词： underwater,Direction of Arrival,PMUT,ultrasonic,AVS
更新于2025-09-12 10:27:22
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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Application of MEMS Enabled Excitation and Detection Schemes to Photoacoustic Imaging
摘要： This paper shows, for the first time, a MEMS enabled photoacoustic system, using a custom MEMS Q-switched Nd:YAG laser for generation of photoacoustic (PA) waves and a custom-built MEMS thin-film aluminium nitride piezoelectric micromachined ultrasound transducers for PA wave detection.
关键词： Photoacoustic,Miniaturisation,PMUT,Aluminium Nitride,MEMS,Imaging,Q-switched Nd:YAG
更新于2025-09-11 14:15:04
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[IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Fabrication and characterization of AlN based Piezoelectric Micromachined Ultrasonic Transducer for contact sensing
摘要： In this paper, we present an aluminum nitride (AlN) Piezoelectric Micro-machined Ultrasonic Transducer (PMUT) for contact sensing, which is a suspended stacked layers Si/Mo electrode /AlN/Al electrode in Silicon substrate. In order to obtain a Si elastic layer with a small thickness, DRIE Si process is utilized to make a deep cavity on the backside of Si substrate to suspend the stacked layers of PMUT device. AlN based PMUT sample is fabricated, having a suspended stacked layers of Si/Mo/AlN/Al measured about 5?m/0.1?m /0.8?m/1?m respectively in the thickness, 100?m in the radius of Si film. The AlN film has a measured surface roughness of 5nm by AFM and has (001) orientation peak by XRD analysis.
关键词： characterization,PMUT,AlN
更新于2025-09-10 09:29:36