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High-sensitivity hydraulic pressure sensor based on Fabry-Perot interferometer filled with polydimethylsiloxane film
摘要： A high-sensitivity hydraulic pressure sensor is proposed, which consists of a Fabry–Perot interferometer (FPI) filled with a polymer film of polydimethylsiloxane (PDMS). The FPI structure is fabricated by splicing a section of hollow core fiber (HCF) to the end-face of a lead-in single mode fiber (SMF). Then, the PDMS is filled into the HCF which acts as a light reflector and a diaphragm to detect external pressure variation. As a result, the length of the FPI cavity and the thickness of the PDMS are 137.8 μm and 33.8 μm, respectively. Experimental results indicate that the sensor’s wavelength exhibits a linear response to the hydraulic pressure, which function is described as y = ?7.35 × 10?3x + 1536.395. Here, x and y represent the hydraulic pressure and the wavelength, respectively. The pressure sensitivity is up to ?7.35 nm/kPa. Besides, a temperature compensation method based on a fiber Bragg grating is proposed to eliminate the influence of temperature. Experiments show that the scheme can effectively eliminate the influence of temperature and achieve accurate measurement of hydraulic pressure.
关键词： Fabry-Perot interferometer,polydimethylsiloxane,temperature compensation,hydraulic pressure sensor,fiber Bragg grating
更新于2025-09-12 10:27:22
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[IEEE 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Paris, France (2018.7.8-2018.7.13)] 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) - Helium-Based Refractometry for Pressure Measurements in the Range 1–100 kPa
摘要： This paper describes an alternative of pressure measurements based on a helium absolute refractometer at 532 nm. The Fabry-Perot cavity has been characterized from relevant parameters and the resolution in pressure of this new optical pressure sensor is lower than 0.2 Pa.
关键词： Pressure-induced distortion coefficient,Coefficient of thermal expansion,Refractometry,Fabry-Perot cavity,Pressure sensor
更新于2025-09-10 09:29:36
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Enhanced Flexible Piezoelectric Sensor by the Integration of P(VDF-TrFE)/AgNWs Film With a-IGZO TFT
摘要： Flexible pressure sensors are important components in future rollable touch screens, health care devices, electronic skins, and more. However, large-area array pressure sensors with small-size, good sensitivity and the ability of detecting high frequency dynamic force remain the key challenges for their practical applications. In this work, we proposed a novel flexible piezoelectric pressure sensor system combined with a P(VDF-TrFE)/AgNWs thin film and an a-IGZO TFT. The doping of AgNWs into the P(VDF-TrFE) can improve the piezoelectric performance of P(VDF-TrFE) without high voltage polarization and pressure stretching process, which are harmful to the performance of TFT. With the combination of the a-IGZO TFT, this pressure sensor can be arrayed 4×4 in an active-matrix design with a dynamic force detecting ability (a response of 1100mV/N), exhibiting good flexibility, fast response speed, high amplification, and lower energy consumption.
关键词： P(VDF-TrFE)/AgNWs,a-IGZO TFT,flexible pressure sensor,array production
更新于2025-09-10 09:29:36
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Roll-to-Roll (R2R) Production of Ultrasensitive, Flexible, and Transparent Pressure Sensors Based on Vertically Aligned Lead Zirconate Titanate and Graphene Nanoplatelets
摘要： Despite extensive advances in the use of piezoelectric materials in flexible electronics, they have numerous shortcomings, including low efficiency, limited flexibility, and lack of transparency. Additionally, the production of these materials is often limited to small batch processes which are difficult to scale up for mass production. A novel method to produce ultrasensitive, high performance, flexible, and transparent piezoelectric materials where both lead zirconate titanate nanoparticles, and graphene nanoplatelets are aligned together in polydimethylsiloxane under an AC electric field in the thickness (“Z”) direction, is reported here for the first time. The electric field alignment improves the piezoelectric response along with transparency and also reduces the amount of filler required to achieve outstanding piezoelectric properties. The resulting ultrasensitive piezoelectric film is able to sense the pressure of a bird feather (1.4 mg) dropped from a certain distance, whereas at the touch of a fingertip, it can generate up to 8.2 V signal. Moreover, the mass production compatibility of the system is also demonstrated by producing a 3 m long and 15 cm wide large-area sample via a novel 44′ long roll-to-roll manufacturing line which is designed and developed by the group.
关键词： piezoelectric pressure sensor,flexible and transparent sensors,electric field–induced alignment,roll-to-roll manufacturing,PZT and graphene nanoplatelets
更新于2025-09-10 09:29:36
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Transcatheter Self-Powered Ultrasensitive Endocardial Pressure Sensor
摘要： Changes in endocardial pressure (EP) have important clinical significance for heart failure patients with impaired cardiac function. As a vital parameter for evaluating cardiac function, EP is commonly monitored by invasive and expensive cardiac catheterization, which is not feasible for long-term and continuous data collection. In this work, a miniaturized, flexible, and self-powered endocardial pressure sensor (SEPS) based on triboelectric nanogenerator (TENG), which is integrated with a surgical catheter for minimally invasive implantation, is reported. In a porcine model, SEPS is implanted into the left ventricle and the left atrium. The SEPS has a good response both in low- and high-pressure environments. The SEPS achieves the ultrasensitivity, real-time monitoring, and mechanical stability in vivo. An excellent linearity (R2 = 0.997) with a sensitivity of 1.195 mV mmHg?1 is obtained. Furthermore, cardiac arrhythmias such as ventricular fibrillation and ventricular premature contraction can also be detected by SEPS. The device may promote the development of miniature implantable medical sensors for monitoring and diagnosis of cardiovascular diseases.
关键词： minimally invasive,cardiovascular disease,self-powered,triboelectric nanogenerator,endocardial pressure sensor
更新于2025-09-10 09:29:36
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P-6.11: Sensor Technology - A new chance for low generation TFT production line
摘要： We analyzed several sensor technology which have good compatibility with current TFF process, including Digital X-Ray Detector, Glass-substrate Pressure Sensor, Glass-substrate Memory, Glass-substrate Antenna and Glass-substrate MEMS Devices. The above offers some directions for low generation TFT production line’s transition.
关键词： Glass-substrate Memory,Digital X-Ray Detector,Glass-substrate MEMS Devices,Glass-substrate Pressure Sensor,Glass-substrate Antenna
更新于2025-09-09 09:28:46
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High transparency flexible sensor for pressure and proximity sensing
摘要： A high-sensitivity and high-transmittance flexible pressure sensor is presented in this paper. Using polydimethylsiloxane (PDMS) sensing film to cover indium tin oxide (ITO) electrodes interdigitated on the polyethylene terephthalate (PET) substrate, an interdigital capacitance (IDC) structure is constructed. The pressure and proximity sensing characteristics of the fabricated IDC sensor are investigated. The experiment results show that the IDC sensor has the piecewise linear function in different pressure range, especially sensitive to the low-pressure range with the pressure sensitivity of 6.64 kPa?1. Moreover, it has a good repeatability with the maximum error rate of 2.73% and a high transmittance over 90% in the wavelength range from 400 nm to 800 nm. As a human finger approaches or leaves, the proximity sensing characteristic emerges, with a maximum sensing distance of about 20 cm.
关键词： Flexible,pressure sensor,proximity sensing,transmittance
更新于2025-09-09 09:28:46
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Experimental Studies in Micromachined AT-Cut Quartz based Differential Vacuum Gauges
摘要： In this paper, a micromachined differential pressure sensor based on force frequency effect in AT-Cut quartz bulk acoustic wave (BAW) resonators for vacuum measurements is presented. The frequency shift arising from the stresses generated in the quartz due to force application is known as force frequency effect. Pressure is sensed by monitoring the shifts in the thickness shear mode (TSM) resonance frequency of AT-cut quartz resonator due to the application of differential pressure across the micromachined quartz diaphragm. The sensors exhibit a large dynamic range of 1 mTorr – 100 Torr with a resolution of ~1 mTorr (in the medium vacuum regime). A parametric study has also been carried out to study the effect of resonator thickness and diameter on sensitivity. It was found that the sensor’s response to pressure is extremely sensitive to mechanical boundary conditions which results in performance characteristics such as dependence on the direction of the applied pressure and unexpected scaling with the diaphragm radius.
关键词： quartz pressure sensor,Pressure sensor,force-frequency effect,piezoelectric,bulk acoustic wave (BAW),micromachined quartz diaphragm
更新于2025-09-04 15:30:14