研究目的
Investigating the use of force frequency effect in AT-Cut quartz bulk acoustic wave (BAW) resonators for vacuum measurements.
研究成果
The study demonstrates a differential pressure sensing technology using micromachined AT-cut quartz, showing high sensitivity and linearity over a wide pressure range. The sensors' response is influenced by the structural bending response of the sensor plate, allowing for tuning sensitivity by mechanical design. The technology shows promise for applications requiring precise vacuum measurements.
研究不足
The sensors' performance is highly sensitive to mechanical boundary conditions, and the fabrication of devices with membrane thickness < 10 μm is challenging due to fragility. The study also notes a tradeoff between span and resolution in flexure-based pressure sensor structures.
1：Experimental Design and Method Selection:
The study utilizes the force-frequency effect in AT-Cut quartz resonators to measure differential pressure. The methodology involves monitoring shifts in the thickness shear mode (TSM) resonance frequency due to applied differential pressure.
2：Sample Selection and Data Sources:
The study uses micromachined circular diaphragms from AT-cut quartz substrates. The thickness and diameter of the diaphragms are varied to study their effect on sensitivity.
3：List of Experimental Equipment and Materials:
Includes AT-Cut quartz wafers, Cr/Au seed layer, nickel electroplating for hard mask, deep reactive ion etch (DRIE) equipment, and Agilent 4395A impedance analyzer for monitoring resonance characteristics.
4：Experimental Procedures and Operational Workflow:
Fabrication involves thinning down quartz wafers, patterning electrodes, and packaging the sensors. Testing involves applying differential pressure and monitoring frequency shifts.
5：Data Analysis Methods:
The study analyzes the shift in resonance frequency as a function of applied pressure and uses Comsol Multiphysics? for stress and frequency shift simulations.
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