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Detection of NH<SUB>3</SUB> Using ZnO Thin Film Sensor Deposited on Si/SiO<SUB>2</SUB> Substrate Derived by RF Magnetron Sputtering
摘要： This paper reports the research results of Zinc Oxide (ZnO) thin film gas sensor which is able to detect low concentration of ammonia gas (NH3). Pure ZnO layer is deposited on Si/SiO2 substrate at room temperature by RF magnetron sputtering technique. Pt micro-heater, platinum resistance thermometer (PRT) and gold electrodes are also fabricated along with ZnO thin film to make a complete NH3 sensor device and the fabrication process is discussed in detail in this manuscript. The deposited ZnO thin film is annealed at different temperatures and the effect of annealing temperature on the properties of ZnO thin film is analyzed by using various characterization techniques such as surface profilometer, XRD, SEM, EDX, etc. A measurement set-up is established for the measurements of various sensor parameters. An operating temperature is optimized for the NH3 gas sensor to enhance the sensitivity of the device. The optimized operating temperature is achieved and measured by Pt heater and PRT, respectively. The measurements are also performed for Pt micro-heater and PRT to calibrate the temperature with respect to heater current. Finally, the gas sensing measurements are performed in the range of small NH3 concentration (below 10 ppm) and the results confirm very good sensitivity even in very small NH3 concentration.
关键词： NH3 Gas,Thin Film,Pt Microheater,NH3 Gas Sensor,RF Sputtering,ZnO
更新于2025-09-23 15:22:29
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Review—System-on-Chip SMO Gas Sensor Integration in Advanced CMOS Technology
摘要： The growing demand for the integration of functionalities on a single device is peaking with the rise of IoT. We are near to having multiple sensors in portable and wearable technologies, made possible through integration of sensor fabrication with mature CMOS manufacturing. In this paper we address semiconductor metal oxide sensors, which have the potential to become a universal sensor since they can be used in many emerging applications. This review concentrates on the gas sensing capabilities of the sensor and summarizes achievements in modeling relevant materials and processes for these emerging devices. Recent advances in sensor fabrication and the modeling thereof are further discussed, followed by a description of the essential electro-thermal-mechanical analyses, employed to estimate the devices’ mechanical reliability. We further address advances made in understanding the sensing layer, which can be modeled similar to a transistor, where instead of a gate contact, the ionosorped gas ions create a surface potential, changing the film’s conduction. Due to the intricate nature of the porous sensing films and the reception-transduction mechanism, many added complexities must be addressed. The importance of a thorough understanding of the electro-thermal-mechanical problem and how it links to the operation of the sensing film is thereby highlighted.
关键词： SMO gas sensors,CMOS integration,sensing mechanism,modeling,microheater design
更新于2025-09-19 17:15:36
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Improved Sensing Capability of Integrated Semiconducting Metal Oxide Gas Sensor Devices
摘要： Semiconducting metal oxide (SMO) gas sensors were designed, fabricated, and characterized in terms of their sensing capability and the thermo-mechanical behavior of the micro-hotplate. The sensors demonstrate high sensitivity at low concentrations of volatile organic compounds (VOCs) at a low power consumption of 10.5 mW. In addition, the sensors realize fast response and recovery times of 20 s and 2.3 min, respectively. To further improve the baseline stability and sensing response characteristics at low power consumption, a novel sensor is conceived of and proposed. Tantalum aluminum (TaAl) is used as a microheater, whereas Pt-doped SnO2 is used as a thin film sensing layer. Both layers were deposited on top of a porous silicon nitride membrane. In this paper, two designs are characterized by simulations and experimental measurements, and the results are comparatively reported. Simultaneously, the impact of a heat pulsing mode and rubber smartphone cases on the sensing performance of the gas sensor are highlighted.
关键词： electro-thermal-mechanical simulation,semiconducting metal oxide,ultra-low power,gas sensor,smartphone,microheater
更新于2025-09-19 17:15:36
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Enhanced Sensing Performance of Integrated Gas Sensor Devices
摘要： Semiconducting metal oxide (SMO) gas sensors, dedicated to wearable devices were designed, fabricated, and characterized in terms of power consumption, thermal distribution, and sensing capability. The sensors demonstrate a sensitivity down to ppb-level VOC concentrations at a low power consumption of 10.5 mW. To further enhance the baseline stability and sensing response characteristics at low power consumption, a new sensor structure is proposed. The design implements novel aspects in terms of fabrication and microheater geometry, leading to improved sensor performance which enables new applications for SMO gas sensors. In this work, two designs were analyzed using experimental characterization and simulation. The results of the analyses of the two sensors are comparatively reported.
关键词： microheater,electo-thermal simulation,gas sensor,semiconducting metal oxide
更新于2025-09-04 15:30:14