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[ASME ASME 2018 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Quebec City, Quebec, Canada (Sunday 26 August 2018)] Volume 4: 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems - A Novel Method for Rapid Microfabrication
摘要: We introduce a novel microfabrication method using direct writing of photoresist with an ultrasonic microplotter equipped. First, the photoresist is driven into the pipette through capillary forces. The pipette is then used to directly write microfeatures on a polydimethylsiloxane (PDMS) substrate. The photoresist is cured on a hot-plate and used as a mold for replication. A second layer of PDMS is cast onto the mold. Once cured on a hot-plate, it is peeled off from the mold to obtain the desired microfeatures. We demonstrate that this method can be used for ultra-rapid and cost-effective fabrication of microchannels (39.65 μm wide) without need for clean room facilities.
关键词: Microchannels,PDMS,Rapid microfabrication
更新于2025-09-23 15:21:01