[IEEE 2018 IEEE International Ultrasonics Symposium (IUS) - Kobe, Japan (2018.10.22-2018.10.25)] 2018 IEEE International Ultrasonics Symposium (IUS) - Low-Loss, High-Frequency and Large-Coupling SH SAW Resonators Based on SiN/LiNbO<inf>3</inf>/Si

摘要： Low-loss, high-frequency and large-coupling-coefficient SAW resonators based on SiN/LN/Si are demonstrated in this study. By bonding the high-velocity Si substrate to the sub-wavelength-thick LN layer, the shear-horizontal mode SAW resonator no longer couples with the bulk modes in substrate and the leaky component is effectively eliminated. As the propagation loss is no longer the main concern for the cut angle selection, the ultra-large cut angle can be used to achieve high coupling coefficient (κ2). By carefully designing the SiN/LN/Si structure, the high-frequency and large-κ2 SAW resonators with low loss are achieved. The fabricated SAW resonators show great potential for current and next generation front ends.