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[IEEE 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Munich, Germany (2019.6.23-2019.6.27)] 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - SiC-SiO <sub/>2</sub> MEMS-DBR Based Widely Tunable Optical Filters Around 1550 nm with Narrow FWHM
摘要： Ever growing optical data transmission networks and miniaturization of spectroscopic equipment demand for small, energy efficient and mass-produced optical components. Here we present distributed Bragg reflector (DBR) mirror based widely tunable optical Fabry-Perot filters comprising a novel material combination namely, silicon carbide (SiC) and silicon dioxide (SiO2) layers with refractive indices of 2.46 and 1.45, respectively. The resulting refractive index step of 1, provides high reflectivities (>99.5 %) with wide stopbands of more than 300 nm. Hence, large wavelength tuning range and a narrow full width at half maximum (FWHM) filtered signals can be produced. Structuring the dielectric layers by surface micromachining creates a free standing movable mirror supported by four beams. Due to inherent stress created during low-temperature plasma enhanced chemical vapor depositions (PECVD) we obtain a tunable stable plane concave resonator. In the end the cross section of a filter shows a fixed bottom DBR deposited on a silicon substrate, a tunable airgap and an electrothermally actuated top MEMS DBR with a gold electrode for heating current IMEMS. On the substrate backside where the filtered signal is exiting an anti-reflection coating is deposited.
关键词： tunable optical filters,SiC-SiO2 MEMS-DBR,PECVD,Fabry-Perot filters,surface micromachining
更新于2025-09-11 14:15:04
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Progresses in Chemical Sensor || Air-Suspended Silicon Micro-Bridge Structures for Metal Oxide- Based Gas Sensing
摘要： Maintaining specific temperature is a key parameter for most of the gas sensing materials, particularly for metal oxide-based thin film layers, to operate them more efficiently to detect different gaseous (or vapor) species at ppm and ppb concentration levels. For field applications, battery-operated micro-gas-sensors, power dissipation and the required temperature stability are to be maintained with a close tolerance for better signal stability and also to analyze the generated data from the sensing element. This chapter mainly focuses on several metal oxide films to highlight the base temperature and its creation on silicon-based platforms. Air-suspended structures are highlighted, and a comparison is drawn between simple and MEMS-based structures from the power dissipation point of view. Ease of fabrication and operation limitations are explained with fabrication issues.
关键词： Platinum resistance thermometer,Gas sensing devices,Platinum micro-heater,Surface micromachining,MEMS,Metal oxide thin films
更新于2025-09-09 09:28:46
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Flip-Chip Bonding Fabrication Technique
摘要： Military systems, outer space exploration and even in medical diagnosis and treatment used magnetic field detection. Low magnetic field detection is particularly important in tracking of magnetic. Traditional magnetometer tends to be bulky that hinders its inclusion into micro-scaled environment. This concern has brought the magnetometer into the trend of device miniaturization. Miniaturized magnetometer is usually fabricated using conventional microfabrication method particularly surface micromachining in which micro structures are built level by level starting from the surface of substrates upwards until completion of final structure. Although the miniaturization of magnetometer has been widely researched and studied, the process however is not. Thus, the process governing the fabrication technique is studied in this paper. Conventional method of fabrication is known as surface micromachining. Besides time consuming, this method requires many consecutive steps in fabrication process and careful alignment of patterns on every layer which increase the complexity. Hence, studies are done to improve time consuming and reliability of the microfabrication process. The objective of this research includes designing micro scale magnetometer and complete device fabrication processes. A micro-scale search coil magnetometer of 15 windings with 600μm thickness of wire and 300μm distance between each wire has been designed.
关键词： Surface Micromachining,Fabrication Technique,Micro magnetometer,Flip-Chip Bonding
更新于2025-09-09 09:28:46