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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A Process to Realize Direct Laser Written Electrostatic Actuator Elements in a Closed Microcavity
摘要： For the first time an electrostatic actuator made by 2-photon polymerization (2PP) that is integrated in a closed microcavity is presented. The cavity is closed by wafer-to-wafer bonding of Parylene-C coated borosilicate glass and silicon wafers. Additionally, the Parylene-C serves as electrical insulation. The actuator consists of a free-standing, electrically connected, movable platform with an outer diameter of 260 μm supported by conical springs. The structure can act as a microfluidic valve. The novel wafer-scale fabrication process enables the electrical connection and electrostatic actuation of movable 2PP-structures and the patterning of a metallization on wafers containing 76 μm high 3D structures. Furthermore, a silicon wafer and a borosilicate glass wafer, which contains metallized 2PP-structures that can withstand a limited temperature load only, are bonded. This process has great potential for versatile applications in MEMS.
关键词： additive manufacturing,3D actuator,Parylene-C bonding,DLW,2PP,active microvalve
更新于2025-09-11 14:15:04
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Dynamic Hysteresis Based Modeling Of Piezoelectric Actuators
摘要： Piezoelectric actuators are popularly applied as actuators in high precision systems due to their small displacement resolution, fast response and simple construction. However, the hysteresis nonlinear behavior limits the dynamic modeling and tracking control of piezoelectric actuators. This paper studies a dynamic model of a moving stage driven by piezoelectric stack actuator. The Bouc-Wen model is introduced and analyzed to express the nonlinear hysteresis term. Two triangular actuating voltages with frequency of 1 Hz and amplitudes of 80 V and 90 V are applied to drive the piezoelectric stack actuator. The results demonstrate the existence of the hysteresis phenomenon between the input voltage and the output displacement of the piezoelectric stack actuator, and validate the correctness of the model.
关键词： Bouc-Wen model,hysteresis modeling,Piezoelectric actuator
更新于2025-09-11 14:15:04
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Hysteretic modeling and simulation of a bilateral piezoelectric stack actuator based on Preisach model
摘要： A bilateral piezoelectric stack actuator (BPSA) is introduced, and its actuated property is also analyzed. Usually, a piezoelectric stack can only undertake significant compressive loads but cannot tolerate tension, while this new actuator is able to generate obvious bilateral actuated outputs. The actuated principle of the new actuator is analyzed firstly. The linear and nonlinear models are also built up. The latter is to analyze the piezoelectric hysteresis based on the classical Preisach model. Moreover, the effect of the preload on the actuator is considered. By comparison with the experiment results, the Preisach model is valid for the present actuator.
关键词： piezoelectric hysteresis,Preisach model,preload,Bilateral piezoelectric stack actuator
更新于2025-09-11 14:15:04
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A Bouc–Wen Model-Based Compensation of the Frequency-Dependent Hysteresis of a Piezoelectric Actuator Exhibiting Odd Harmonic Oscillation
摘要： This paper proposes an enhancement of the Bouc–Wen hysteresis model to capture the frequency-dependent hysteretic behavior of a thin bimorph-type piezoelectric actuator which also exhibits odd harmonic oscillation (OHO) at specific input frequencies. The odd harmonic repetitive controller has recently been proposed to compensate for the hysteresis, and attenuates the OHO of the piezoelectric actuator for which the hysteresis nonlinearity is regarded as a disturbance. This paper proposes an alternate treatment of the hysteresis compensation with the attenuation of the OHO observed at some input frequencies. It will be shown that the proposed compensator fully utilizes the mathematical structure of the enhanced Bouc–Wen model proposed in this paper to compensate the hysteresis and to attenuate the OHO. The results of the hysteresis compensation experiment illustrate the excellent performance of the proposed control system, especially at the frequencies where OHO is conspicuous.
关键词： Bouc–Wen model,hysteresis compensation,hysteresis modeling,odd harmonic oscillation,piezoelectric actuator
更新于2025-09-11 14:15:04
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Finite Element Modellingand Simulations of Piezoelectric Actuators Responses with Uncertainty Quantification
摘要： Piezoelectric structures are widely used in engineering designs including sensors, actuators, and energy-harvesting devices. In this paper, we present the development of a three-dimensional finite element model for simulations of piezoelectric actuators and quantification of their responses under uncertain parameter inputs. The implementation of the finite element model is based on standard nodal approach extended for piezoelectric materials using three-dimensional tetrahedral and hexahedral elements. To account for electrical-mechanical coupling in piezoelectric materials, an additional degree of freedom for electrical potential is added to each node in those elements together with their usual mechanical displacement unknowns. The development was validated with analytical and experimental data for a range of problems from a single-layer piezoelectric beam to multiple layer beams in unimorph and bimorph arrangement. A more detailed analysis is conducted for a unimorph composite plate actuator with different design parameters. Uncertainty quantification was also performed to evaluate the sensitivity of the responses of the piezoelectric composite plate with an uncertain input of material properties. This sheds light on understanding the variations in reported responses of the device; at the same time, providing extra confidence to the numerical model.
关键词： finite element method,uncertainty quantification,piezoelectric materials,unimorph actuator,energy harvesting,PZT
更新于2025-09-10 09:29:36
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Experimental investigation on the optical emission spectroscopy of dielectric barrier discharge plasma actuators at different atmospheric pressures
摘要： The experiment of dielectric barrier discharge (DBD) plasma actuator using an asymmetrical electrodes configuration is conducted to investigate optical emission spectroscopy of the plasma discharge at pressures from 0.02 to 0.1 Mpa in air mixed with various concentrations of Ar (0%, 20%, 50%, and 80%). The measurements were performed with a sinusoidal driven DBD having an amplitude of 12 kV and a frequency of 1 kHz. The diffuse DBD discharge images and the optical emission spectra are recorded successfully, and the effects of pressure and concentration of Ar are investigated, respectively. It is found that the emission intensities of air discharge increase with decreasing the pressure but increasing the concentration of Ar to some extent. Especially, when the pressure is lower than 0.04 Mpa or the concentration of Ar is over 50%, the emission intensities increase obviously rapidly. The experimental results indicate that the low pressure environment and the high concentration of Ar are beneficial to improve the performance of the DBD plasma discharge actuators.
关键词： atmospheric pressure,plasma actuator,optical emission spectroscopy,dielectric barrier discharge,Ar concentration
更新于2025-09-09 09:28:46
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Modelling and Analysis of Characteristics of a Piezoelectric-Actuated Micro-/Nano Compliant Platform Using Bond Graph Approach
摘要： The piezoelectric-actuated ?exure-based compliant platform is commonly adopted in many ?elds of micro and nanotechnology. In this paper, bond graph modeling, and kinematic and dynamic characteristics of a piezoelectric-actuated micro-/nano compliant platform system are investigated. During modeling, the bond graph model of the piezoelectric actuator (PZT) is derived by considering both the electrical domain and the mechanical domain. Considering the compliances of ?exure hinges and elastic linkages, as well as the input ends, the bond graph model for the bridge-type displacement ampli?cation mechanism in the compliant platform is established by combining pseudo-rigid-body (PRB) model theory and elastic beam theory. Based on the interactions between the PZT subsystem and compliant platform subsystem, the kinematic performance of the proposed compliant platform system is evaluated through both computer simulations and experimental tests. Furthermore, the frequency responses, dynamic responses and load capacity of the compliant platform system are studied. This paper explores a new modeling method for a piezoelectric-actuated compliant platform system, which can provide an effective solution when analyzing the micro-/nano system.
关键词： piezoelectric actuator,micro-/nano compliant platform,bridge-type displacement ampli?cation mechanism,bond graph
更新于2025-09-09 09:28:46
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Verification of the feed-forward control for a piezoelectric actuator using differential flatness approach
摘要： In the last decade, the applications of nano- and micro-technology are widely used in many fields. In the modern mobile devices, such as digital cameras, there is an increased demand to achieve fast and precise positioning for some parts such as the recording sensor. Therefore, a smart material (piezoelectric) is used to achieve this requirement. This article discusses the feed-forward control for a piezoelectric actuator using differential flatness approach. The differential flatness approach is used to calculate the required voltage to control the piezoelectric actuator movement. The control voltage will be applied to the real actuator. The simulation and experimental results are compared for the actuator. The aim of this article is to verify the feed-forward control for second eigenfrequency using the differential flatness approach for the piezoelectric actuator.
关键词： piezoelectric actuator,second eigenfrequency,Differential flatness approach
更新于2025-09-09 09:28:46
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Temporal variation of the spatial density distribution above a nanosecond pulsed dielectric barrier discharge plasma actuator in quiescent air
摘要： The thermal perturbation caused by a nanosecond pulsed dielectric barrier discharge (ns-DBD) plasma actuator may lead to boundary layer transition. Hence, understanding of the thermal flow induced by the ns-DBD plasma actuator will contribute to the development of an efficient flow control device for various engineering applications. In this study, the spatial density distribution related to the thermal flow was experimentally investigated using both qualitative and quantitative schlieren techniques. The focus of this study is to understand the initial temporal variation of the spatial density distribution above the ns-DBD plasma actuator in quiescent air. The quantitative visualisation showed that a hot plume is generated from the edge of the exposed electrode and moves slightly towards the ground electrode. A possible explanation is that an ionic wind and/or an induced jet leads to the movement of the hot plume. However, the plasma-induced flow (the ionic wind and the induced jet) is generated after the primary plasma discharges; namely, the hot plume does not move immediately after the first plasma discharge. At almost the same time as the movement of the hot plume, consecutive plasma discharges enhance the density of the hot plume; thereafter, the density reaches almost a steady state.
关键词： nanosecond pulsed dielectric barrier discharge,plasma actuator,schlieren techniques,boundary layer transition,thermal perturbation
更新于2025-09-09 09:28:46
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A Feasibility Study of Controllable Gas Foil Bearings With Piezoelectric Materials Via Rotordynamic Model Predictions
摘要： This study presents a new concept of controllable gas foil bearings (C-GFBs) with piezoelectric actuators. The C-GFB consists of a laminated top foil, bump foil, and piezo stacks and can simply change the bearing shape or film thickness locally and globally by varying the thickness of the piezo stacks with input voltages. The control schemes are (1) clearance control: the bearing clearance adjusted by changing overall piezo stack thickness, and (2) preload control: the mechanical preload modulated by the thickness expansion of several piezo stacks. Bearing lubrication performance is predicted for four cases of C-GFBs with different bearing clearances and preloads. The piezo stack control generates meaningful differences in the fluid-film thickness and pressure. Clearance control has a great effect on the dynamic force coefficients, but preload control slightly increases. Furthermore, the rotordynamic prediction of a rotor supported on two journal C-GFBs is conducted. As a result, both control modes for C-GFB are found to have a positive effect on rotordynamic amplitudes. Finally, using the orbit simulations, the C-GFB is controlled to have a small bearing clearance and large preload at critical speeds to make it possible to stably pass through the critical speeds. Consequently, it turns out that the C-GFB can improve bearing lubrication and rotordynamic performances by controlling only the input voltage of the piezo stacks. In addition, the C-GFB can be used to form various shapes to meet the operation conditions of an applied system.
关键词： active gas bearing,rotordynamic instability,piezoelectric actuator,vibration control,gas foil bearing
更新于2025-09-09 09:28:46