1：Experimental Design and Method Selection:

The study employs bond graph modeling to investigate the kinematic and dynamic characteristics of a piezoelectric-actuated micro-/nano compliant platform system. The methodology includes deriving the bond graph model of the piezoelectric actuator (PZT) by considering both the electrical and mechanical domains, and establishing the bond graph model for the bridge-type displacement ampli?cation mechanism by combining pseudo-rigid-body (PRB) model theory and elastic beam theory.

2：Sample Selection and Data Sources:

The prototype of the compliant platform was monolithically fabricated by a wire electrical discharge machining (WEDM) process. The geometrical parameters of the compliant platform are listed in the paper.

3：List of Experimental Equipment and Materials:

A piezo controller (model E01, from COREMORROW, Inc., Harbin, China) was utilized to drive the PZTs (model PSt-40VS15, from COREMORROW, Inc., Harbin, China). The output displacements of the working platform were obtained by measuring the sensor target using a laser displacement sensor (model LK-H050, KEYENCE, Osaka, Japan) with a measurement range of 20 mm and a resolution of 100 nm. The coupling displacements were measured by capacitance displacement sensors (model CS5, from MICRO-EPSILION, Inc., Bavaria, Germany) with a measurement range of 5 mm and a resolution of 100 nm.

4：Experimental Procedures and Operational Workflow:

The testing experiments of the compliant platform were established where all the ?xed holes of the compliant platform were ?xed on a ?xed base that was mounted on an optical table to reduce the ground vibration. A step command signal with an amplitude of 50 V is generated and sent to the PZT in the X direction to determine the dynamic parameters of the compliant platform experimentally.

5：Data Analysis Methods:

The damping ratio ξ of the system is estimated by using the percent overshoot of the system, which can be measured from the step response by ?nding the ratio of the maximum peak and steady state value. The equivalent damping parameter bc is derived through the experimental data.