[IEEE 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Qingdao, China (2018.10.31-2018.11.3)] 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Design of a flexible MEMS pressure sensor array in dog’s artificial knee joint

摘要： This paper proposed a novel design of flexible sensor array which can be applied to measure the pressure distribution in the dog’s artificial knee joint after the Total Knee Arthroplasty(TKA). Using MEMS technology, the flexible sensor array mainly consists of 100 sensing points which are fabricated based on SOI, and spin-coated polyimide(PI) films. It is strongly attached to the surface of polyethylene insert in the dog’s artificial knee joint. The flexible MEMS sensor array is biocompatible for vivo animal experiment and expected to play an important role in the research of improving the surgery effect of TKA.