研究目的
To design a flexible MEMS pressure sensor array for measuring pressure distribution in a dog's artificial knee joint after Total Knee Arthroplasty (TKA), aiming to improve surgery outcomes and joint longevity.
研究成果
The designed flexible MEMS pressure sensor array, based on SOI and PI films, is suitable for measuring pressure distribution in a dog's artificial knee joint, offering direct sensing, high precision, and biocompatibility for future vivo animal experiments to enhance TKA outcomes.
研究不足
The paper does not explicitly mention limitations, but potential constraints could include the complexity of fabrication, challenges in vivo animal testing, and the need for further validation of biocompatibility and accuracy in real-world applications.
1：Experimental Design and Method Selection:
The design utilizes MEMS technology with piezoresistive silicon resistor stripes based on SOI, wrapped in polyimide (PI) films for flexibility and biocompatibility. The sensor array is attached to the polyethylene insert surface of the artificial knee joint to directly measure pressure distribution.
2：Sample Selection and Data Sources:
The sensor array is designed for use in vivo animal experiments with dogs, specifically targeting the artificial knee joint components.
3：List of Experimental Equipment and Materials:
SOI wafer from Soitec Group, polyimide films, LOCTITE 4902 biological adhesive, WaferBOND? HT-10.10 material from Brewer Science, parylene, Ti/Au for wiring, and fabrication equipment such as LPCVD, RIE, CMP, and BHF.
4：10 material from Brewer Science, parylene, Ti/Au for wiring, and fabrication equipment such as LPCVD, RIE, CMP, and BHF.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Fabrication involves patterning SOI wafer, depositing SiO2 passivation, doping with B+, forming TiSi2-Si ohmic contacts, sputtering Ti/Au wires, depositing parylene insulation, spin-coating PI films, temporary bonding, and final release. The sensor is attached to the knee insert using adhesive for pressure measurement.
5：Data Analysis Methods:
Based on piezoresistive effect, resistance changes in silicon stripes are measured under pressure, with stress-resistance relationship given by ?R/R = πtσt + πlσl.
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