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[IEEE 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Qingdao, China (2018.10.31-2018.11.3)] 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Design of a flexible MEMS pressure sensor array in dog’s artificial knee joint
摘要： This paper proposed a novel design of flexible sensor array which can be applied to measure the pressure distribution in the dog’s artificial knee joint after the Total Knee Arthroplasty(TKA). Using MEMS technology, the flexible sensor array mainly consists of 100 sensing points which are fabricated based on SOI, and spin-coated polyimide(PI) films. It is strongly attached to the surface of polyethylene insert in the dog’s artificial knee joint. The flexible MEMS sensor array is biocompatible for vivo animal experiment and expected to play an important role in the research of improving the surgery effect of TKA.
关键词： flexible pressure sensor,MEMS,artificial knee joint
更新于2025-09-23 15:22:29
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Enhanced Flexible Piezoelectric Sensor by the Integration of P(VDF-TrFE)/AgNWs Film With a-IGZO TFT
摘要： Flexible pressure sensors are important components in future rollable touch screens, health care devices, electronic skins, and more. However, large-area array pressure sensors with small-size, good sensitivity and the ability of detecting high frequency dynamic force remain the key challenges for their practical applications. In this work, we proposed a novel flexible piezoelectric pressure sensor system combined with a P(VDF-TrFE)/AgNWs thin film and an a-IGZO TFT. The doping of AgNWs into the P(VDF-TrFE) can improve the piezoelectric performance of P(VDF-TrFE) without high voltage polarization and pressure stretching process, which are harmful to the performance of TFT. With the combination of the a-IGZO TFT, this pressure sensor can be arrayed 4×4 in an active-matrix design with a dynamic force detecting ability (a response of 1100mV/N), exhibiting good flexibility, fast response speed, high amplification, and lower energy consumption.
关键词： P(VDF-TrFE)/AgNWs,a-IGZO TFT,flexible pressure sensor,array production
更新于2025-09-10 09:29:36
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High transparency flexible sensor for pressure and proximity sensing
摘要： A high-sensitivity and high-transmittance flexible pressure sensor is presented in this paper. Using polydimethylsiloxane (PDMS) sensing film to cover indium tin oxide (ITO) electrodes interdigitated on the polyethylene terephthalate (PET) substrate, an interdigital capacitance (IDC) structure is constructed. The pressure and proximity sensing characteristics of the fabricated IDC sensor are investigated. The experiment results show that the IDC sensor has the piecewise linear function in different pressure range, especially sensitive to the low-pressure range with the pressure sensitivity of 6.64 kPa?1. Moreover, it has a good repeatability with the maximum error rate of 2.73% and a high transmittance over 90% in the wavelength range from 400 nm to 800 nm. As a human finger approaches or leaves, the proximity sensing characteristic emerges, with a maximum sensing distance of about 20 cm.
关键词： Flexible,pressure sensor,proximity sensing,transmittance
更新于2025-09-09 09:28:46