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Gas Breakdown and Discharge Formation in High-Power Impulse Magnetron Sputtering
摘要： Discharge behaviors of high-power impulse magnetron sputtering with different targets have been investigated. Distinct current–voltage curves and target current waveforms are observed. Breakdown voltage and the maximum target current show a periodic drop with the increase of atomic number in subgroups and periods. The target current density is found to be mainly affected by the secondary electron emission yield. Thus, its magnitude is unable to directly evaluate the ionization degree of sputtered atoms in high-power impulse magnetron sputtering (HiPIMS) process. In this paper, the interactive influence of secondary electron emission, sputter yield, and ionization energy on the ionization degree of sputtered atoms is discussed based on the analysis of the voltage and current characteristics. As a result, targets can be categorized into three sorts according to the ionization degree: 1) low ionization degree targets, such as Ag and C less than 10%; 2) intermediate ionization degree targets like Cr and Cu with 55% and 35%; 3) Ti, Zr, and Mo targets with the second ionization processes. These results provide institutive operation ranges for the state-of-the-art HiPIMS applications.
关键词： optical emission spectroscopy (OES),ionization degree,Current waveform,gas breakdown,high-power impulse magnetron sputtering (HiPIMS)
更新于2025-09-23 15:22:29
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[IEEE 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Budapest (2018.7.1-2018.7.5)] 2018 IEEE 2nd International Conference on Dielectrics (ICD) - Numerical Simulation of Gas Breakdown in Microgaps Based on PIC/MCC Method
摘要： Paschen’s curve which is based on Townsend effects has been used to describe the gas breakdown voltage until more and more experiments has shown that it is not entirely accurate in describing breakdown when the electrode gaps less than 10μm. Thus it is of great significance to study the microscale gaps breakdown law and the discharge mechanism of insulation structure in micro-electronic components. In this work, numerical experiments using the particle-in-cell/Monte Carlo collisions method are used to simulate the process of microgap discharge in the air. The variation of the number of charged particles, the current intensity and the electric field distribution are taken as the criteria of breakdown to analyze the breakdown characteristics in microgaps and the points of time determined by different criteria are basically the same. Furthermore, field emission and thermionic emission have different contributions to the entire electron emission from the cathode under different applied voltages and cathode temperatures. The series of experimental results can provide further theoretical guidance for the physical mechanism of microscale dielectric breakdown.
关键词： Particle-in-cell method,electron emission,gas breakdown,microscale gaps
更新于2025-09-10 09:29:36