- 标题
- 摘要
- 关键词
- 实验方案
- 产品
-
[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Monolithic Integration of Plasmonic Meta-Material Absorber with CMOS-MEMs Infrared Sensor for Responsivity Enhancement and Human Detection Application
摘要： This study integrates monolithically a metal-insulator-metal-based plasmonic metamaterial absorber (PMA) with a thermoelectric (TE) infrared (IR) sensor using standard TSMC CMOS platform. The proposed design extends the strip-via releasing hole structure in [1] to further integrate MIM absorber with TE IR sensor. Such design exhibits three merits: (1) the line width requirement of MIM absorber is achieved by CMOS process, (2) the absorption peaks of MIM absorbers can be modulated by pattern designs in the epsilon-near-pole region, and (3) the MIM absorbers can be designed to broaden the absorption spectrum of IR sensor. In application, the absorption spectrum of IR sensor is designed within 8-14μm in this study for human detection application. Measurement result demonstrates the integration of MIM absorber and IR sensor can achieve 21% improvement and the measured absorption spectrum matches with simulation.
关键词： CMOS-MEMS,human detection,thermoelectric infrared sensor,responsivity enhancement,plasmonic metamaterial absorber
更新于2025-09-23 15:21:01
-
Location Ambiguity Resolution and Tracking Method of Human Targets in Wireless Infrared Sensor Network
摘要： Human tracking has attracted extensive attention by using low-cost pyroelectric infrared sensor network in recent years. This paper presents a location ambiguity resolution and tracking method for human targets in wireless, distributed and binary infrared sensor network. The tracking system can detect the human targets in the detection space, and activate the sensor detection lines dynamically. A bearing-crossing location method is designed. The intersections of all activated detection lines are called primary measurement points for human location, and some of them are false measurement points. The ambiguity of this bearing-crossing location method is discussed and a two-level bearing-crossing algorithm is proposed based on quartic K-means clustering and joint cost function. For the first level, an anti-logic algorithm is designed to get the initial effective measurement points, then these points are assigned to different targets using K-means clustering. For the second level, the final effective points are obtained by using a special joint cost function, and they are assigned to different targets using K-means clustering once again to get the final locating results. The cost value is used as a weight to adjust the covariance parameter in Kalman filter for target tracking as well. The experimental results show that the average tracking error of human targets is less than 0.8 m in a 10 m×10 m space, which verify the proposed location ambiguity resolution and tracking method.
关键词： Wireless Infrared sensor network,Cost function,Multiple human tracking,Binary pyroelectric infrared sensor network,Location ambiguity,Bearing-crossing location,Quadratic K-means clustering
更新于2025-09-10 09:29:36
-
Performance enhance of CMOS-MEMS thermoelectric infrared sensor by using sensing material and structure design
摘要： This study presents the micro thermoelectric infrared sensor consisted of the heat material. Experiment results indicate the Detectivity of proposed design is 2-2.6 fold higher The proposed infrared absorber design has an umbrella-like structure with a post anchor to the TSMC 0.18μm 1P6M standard CMOS process and the in-house post-CMOS MEMS process. (infrared sensor consisted of only the serpentine structure with embedded thermocouple), a transduction absorber and the serpentine structure with embedded thermocouple using the serpentine suspension with embedded thermocouple. As compare with the reference design much higher Seebeck coefficient (56-fold), and is employed in this study as the thermocouple junctions is increased. Moreover, the umbrella-like structure has higher infrared absorption area with and without Silicide are respectively characterized. The poly-Si with no Silicide has a as compare with the serpentine structure. In addition, the Seebeck coefficients of poly-Si films better heat-flow path is achieved and the temperature difference between the hot and cold than that of the reference one at 200mtorr. Experiment also show that the responsivity enhancement of proposed design is further increased as the sensor size is reduced in area.
关键词： thermoelectric,Seebeck effect,thermopile,CMOS-MEMS,infrared sensor
更新于2025-09-09 09:28:46