A simple, low cost ink system for Drop-On-Demand printing high performance metal oxide dielectric film at low temperature

摘要： We have successfully developed an ink system containing cheap raw materials through a simple process and have printed ZrOx dielectric film at a relatively low annealing temperature of 250 °C. The ZrOx dielectric film afforded a leakage current density of 5.4×10-6 A/cm2 at 1 MV/cm and a dielectric constant of 10, which shows promising future for flexible electronics. The ink system shows a temperature-induced gelation behavior and gel network is formed when temperature rises. A high concentration of oxide precursors is obtained near the network area through the absorption function of polymer groups, and thus oxide structure can be formed at a relatively low temperature due to the shorter diffusion path of precursor polymerization. The microstructure of printed ZrOx film was investigated by High Resolution Transmission Electron Microscope (HRTEM), Fourier-transform infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS), and the effect of annealing temperature on film structure was studied.