- 标题
- 摘要
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- 实验方案
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Flip-Chip Bonding Fabrication Technique
摘要： Military systems, outer space exploration and even in medical diagnosis and treatment used magnetic field detection. Low magnetic field detection is particularly important in tracking of magnetic. Traditional magnetometer tends to be bulky that hinders its inclusion into micro-scaled environment. This concern has brought the magnetometer into the trend of device miniaturization. Miniaturized magnetometer is usually fabricated using conventional microfabrication method particularly surface micromachining in which micro structures are built level by level starting from the surface of substrates upwards until completion of final structure. Although the miniaturization of magnetometer has been widely researched and studied, the process however is not. Thus, the process governing the fabrication technique is studied in this paper. Conventional method of fabrication is known as surface micromachining. Besides time consuming, this method requires many consecutive steps in fabrication process and careful alignment of patterns on every layer which increase the complexity. Hence, studies are done to improve time consuming and reliability of the microfabrication process. The objective of this research includes designing micro scale magnetometer and complete device fabrication processes. A micro-scale search coil magnetometer of 15 windings with 600μm thickness of wire and 300μm distance between each wire has been designed.
关键词： Surface Micromachining,Fabrication Technique,Micro magnetometer,Flip-Chip Bonding
更新于2025-09-09 09:28:46
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Development of Thermal Kinetic Inductance Detectors Suitable for X-ray Spectroscopy
摘要： We report on the development of thermal kinetic inductance detectors (TKIDs) suitable to perform X-ray spectroscopy measurements. The aim is to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters. The thermal mode is a variation on the MKID classical way of operation that has generated interest in recent years. TKIDs can offer the MKIDs inherent multiplexibility in the frequency domain, a high spatial resolution comparable with CCDs, and an energy resolution theoretically limited only by thermodynamic fluctuations across the thermal weak links. Microresonators are built in Ti/TiN multilayer technology with the inductive part thermally coupled with a metal absorber on a suspended SiN membrane, to avoid escape of phonons from the film to the substrate. The mid-term goal is to optimize the single-pixel design in terms of superconducting critical temperatures, internal quality factors, kinetic inductance and spectral energy resolution. The final goal is to realize a demonstrator array for a next generation thousand pixels X-ray spectrometer. In this contribution, the status of the project after one year of developments is reported, with detailed reference to the microresonators design and simulations and to the fabrication process.
关键词： Thermal mode,Microwave kinetic inductance detectors,TKID,MKIDs,Thin film,X-ray spectroscopy,Superconducting film,Micromachining,Super-conductive microresonators,Thermal kinetic inductance detectors
更新于2025-09-04 15:30:14
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Simultaneous measurements of temperature and pressure with a dual-cavity Fabry-Perot sensor
摘要： A fiber-optic dual-cavity Fabry-Perot interferometric sensor for the simultaneous measurement of temperature and pressure is proposed and experimentally demonstrated. The sensor cascades a fiber-optic intrinsic Fabry–Perot interferometer (IFPI) and an extrinsic Fabry–Perot interferometer (EFPI). The IFPI is used as the temperature sensor and the EFPI is used as the pressure sensor. The pressure sensor is based on a diaphragm-free structure, and can work stably at high temperature. Two optical path differences are interrogated simultaneously by using the fast Fourier transform-based white-light interferometry and the peak-to-peak method. Experimental results show that the proposed sensor exhibits a temperature sensitivity of 29.63 nm/°C within the temperature range of 40-1100 °C, and a pressure sensitivity of 1465.8 nm/MPa within the pressure range of 0-10 MPa at the room temperature.
关键词： pressure measurement,femtosecond laser micromachining,fiber optics sensors,Fabry-Perot interferometers,temperature measurement
更新于2025-09-04 15:30:14
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[Institution of Engineering and Technology 12th European Conference on Antennas and Propagation (EuCAP 2018) - London, UK (9-13 April 2018)] 12th European Conference on Antennas and Propagation (EuCAP 2018) - Antennas for Space Instruments from GHz to THz
摘要： In this paper we present an overview of different antenna technologies for space-based instruments. We show that some of the designs that work well at gigahertz frequencies are difficult to implement at terahertz frequencies due to tight tolerance and rms surface finish requirements. We also show that antenna designs are dictated not only by the frequency of operations but also by the space platform of choice. In this paper, we also present ideas for low-profile terahertz antennas for implementation on SmallSat and CubeSat platforms.
关键词： silicon,micromachining,antenna,terahertz,low-profile,micro-lens
更新于2025-09-04 15:30:14