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[IEEE 2019 18th International Conference on Optical Communications and Networks (ICOCN) - Huangshan, China (2019.8.5-2019.8.8)] 2019 18th International Conference on Optical Communications and Networks (ICOCN) - Ultracompact add-drop filters based on single nanobeam cavity
摘要: Ultracompact filters using single nanobeam photonic crystal cavity are proposed, designed and experimentally demonstrated in this work. Transversely antisymmetric multimode nanobeam photonic crystal cavities are employed in the design to implement mode-selective waveguide-cavity coupling and achieve complete channel drop filtering function. Experimental results show the insertion loss of through port, drop port and the crosstalk of add port are -0.1 dB, -0.2 dB and -12.5 dB, respectively. The footprint of the involved nanobeam photonic crystal cavity is only 12 μm2 and indicating huge potentials in future VLSI photonics applications.
关键词: nanobeam photonic crystal cavities,asymmetric multimode periodic waveguides,ultracompact photonic devices,add-drop filters
更新于2025-09-16 10:30:52
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High-Q-factor nanobeam photonic crystal cavities in bulk silicon carbide
摘要: Silicon carbide (SiC) is a promising optical material for stable and broadband nanophotonics. To date, thin crystalline SiC layers for nanophotonic platforms have been created by ion implantation or growth on other materials, which may cause optical absorption in the SiC layer. We fabricated SiC nanobeam photonic crystal cavities directly from a crystalline (4H) SiC bulk wafer using oblique plasma etching to avoid material-based optical absorptions. The measured quality (Q) factor of the nanobeam photonic crystal cavity reaches 4 (cid:2) 104, which is the highest recorded Q factor in crystalline SiC cavities. Furthermore, we investigated theoretical Q factors by taking into account structural imperfections unique to this fabrication process and compared them with the experimental results.
关键词: oblique plasma etching,nanobeam photonic crystal cavities,structural imperfections,Silicon carbide,quality factor
更新于2025-09-09 09:28:46