- 标题
- 摘要
- 关键词
- 实验方案
- 产品
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Micro Grating Deposition on Non-Planar Surfaces by Polymer-Assisted Transfer Printing
摘要： By spin-coating a few hundred of nanometer thick poly(methyl methacrylate) (PMMA) film on a micron or a sub-micron scale structure, the structure can be transferred on an arbitrary substrate. More precisely, by using a thin PMMA support layer and releasing the structure from the transient substrate into water, the PMMA with the structure can be collected on a desired substrate. Here, this technique is demonstrated to be suitable for transferring metallic binary grating and few-layer Bragg gratings from flat substrates onto 3D-printed convex lenses. Moreover, the thin PMMA film is sufficiently strong to support centimeter size free-standing areas. This enables fabrication of 1.5 μm thick, free-standing structure of a Bragg-grating with PMMA. Thus, the presented technique provides a powerful tool for transfer printing of micron scale structures.
关键词： transfer printing,non-planar surfaces,free-standing structures,microstructure transfer
更新于2025-09-23 15:23:52
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[Laser Institute of America ICALEO?? 2017: 36th International Congress on Applications of Lasers & Electro-Optics - Atlanta, Georgia, USA (October 22a??26, 2017)] International Congress on Applications of Lasers & Electro-Optics - Laser direct writing lithography for rapid fabrication on non-planar surfaces
摘要： A modified laser direct writing lithography system with dynamic focusing is presented. This improved system can realize rapid fabrication on non-planar surfaces with large curvature and it offers new possibilities for fabricating micro-patterns on curved surfaces in an easy and fast way. A dynamic focusing lens group which is driven by a linear voice coil motor is introduced and it can rapidly control the laser spot to focus on the curved surface when processing in real-time. The focus range is almost 10 mm and it can be larger when working with the z-stage. The mathematic expression of dynamic focusing is deduced and the corresponding experiment results agree with the numerical analysis, which shows the practicability of the system. The effects of slopes with different tilted angles on exposure linewidth are studied. Finally, a concentric-circle grating is fabricated on a convex substrate with a diameter of 30 mm and a radius of curvature of 19.918 mm. The grating has homogeneous linewidth of 10 μm and line space of 20 μm, and the total processing time is within 40s. This technique can greatly improve the efficiency and has great potentials, such as rapid fabrication of diffractive optical elements (DOEs) or microelectromechanical systems (MEMS) on arbitrary 3D curved surfaces.
关键词： non-planar surfaces,dynamic focusing,micro-patterns,rapid fabrication,laser direct writing lithography
更新于2025-09-23 15:19:57