研究目的
To demonstrate the suitability of a polymer-assisted transfer printing technique, inspired by graphene transfer methods, for transferring micro- and nanoscale optical components, such as metallic and dielectric gratings, from flat substrates onto 3D-printed convex lenses and creating free-standing structures.
研究成果
The graphene-inspired transfer technique is effective for depositing micro- and nanoscale gratings on non-planar surfaces, enabling the creation of free-standing structures and multilayer optical components. Despite challenges like wrinkles and adhesion, it offers a versatile platform for advanced photonic applications, with potential for further optimization in material selection and process automation.
研究不足
The technique suffers from wrinkles and fractures in the transferred films, poor adhesion between PMMA and grating structures, and dependence on manual operation leading to positional tolerance issues. The PMMA layer's thickness affects optical properties and must be accounted for in design.
1：Experimental Design and Method Selection:
The study adapts the conventional graphene transfer technique, using a thin PMMA support layer to transfer micro-grating structures. The process involves fabrication on a transient substrate (copper-coated glass), spin-coating with PMMA, wet etching of the copper release layer, and transfer to final substrates (acryl plates with holes or 3D-printed lenses).
2：Sample Selection and Data Sources:
Samples include metallic gratings (50 nm gold) and dielectric Bragg gratings (850 nm thick, composed of Al2O3 and TiO2 layers) fabricated on copper-coated borosilicate microscope slides.
3：List of Experimental Equipment and Materials:
Key equipment includes thermal evaporator (Leybold Univex 300), stylus profiler (Veeco Dektak 150), electron beam writer (Vistec EBPG 5000+), atomic layer deposition system (TFS 200 by Beneq), spin coater, hotplate, optical microscope (Leica DM), SEM (Leo 5 Gemini), spectrophotometer (Perkin Elmer lambda-9), and oxygen plasma etcher. Materials include PMMA resist (ARP 642.09), copper pellets (99.99% pure), gold, ferric chloride, acetone, isopropanol, deionized water, and 3D-printed lenses made with Opticlear material.
4：09), copper pellets (99% pure), gold, ferric chloride, acetone, isopropanol, deionized water, and 3D-printed lenses made with Opticlear material. Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: For metallic grating: Evaporate Cu on glass, spin-coat PMMA resist, pattern with e-beam lithography, develop in MIBK, evaporate Au, lift-off in acetone. For dielectric grating: Use ALD to deposit Al2O3 and TiO2 layers on Cu-coated glass. For both: Spin-coat PMMA support layer, cure, etch Cu in ferric chloride, rinse in water, transfer to substrate (acryl plate or lens), dry on hotplate, optionally remove PMMA with oxygen plasma.
5：Data Analysis Methods:
Characterization using optical microscopy, SEM, and spectrophotometry (transmittance measurements 400-800 nm). Simulations performed using Fourier modal method to compare with measured transmittance spectra.
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stylus profiler
Dektak 150
Veeco
Measured the thickness of evaporated copper layers.
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optical microscope
DM
Leica
Visualized transferred metallic gratings to check for changes and detachments.
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spectrophotometer
lambda-9
Perkin Elmer
Characterized transmittance of dielectric Bragg gratings in the wavelength range of 400-800 nm.
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thermal evaporator
Univex 300
Leybold
Used for evaporating copper and gold layers onto substrates.
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electron beam writer
EBPG 5000+
Vistec
Used for patterning samples with electron beam lithography.
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atomic layer deposition system
TFS 200
Beneq
Fabricated dielectric Bragg gratings by depositing Al2O3 and TiO2 layers.
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SEM
Leo 5 Gemini
Used for imaging cross-sections of fabricated structures, such as the Bragg grating with PMMA layer.
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PMMA resist
ARP 642.09
Allresist GmbH
Used as a support layer for transfer printing and as an electron beam resist.
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3D-printed lens
PrintOptical technology
Served as a curved substrate for transferring gratings, made from Opticlear material.
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