- 标题
- 摘要
- 关键词
- 实验方案
- 产品
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[IEEE 2019 4th International Symposium on Instrumentation Systems, Circuits and Transducers (INSCIT) - Sao Paulo, Brazil (2019.8.26-2019.8.30)] 2019 4th International Symposium on Instrumentation Systems, Circuits and Transducers (INSCIT) - Normalized Spectral Responsivity Measurement of Photodiode by Direct Method Using a Supercontinuum Laser Source
摘要： A Taguchi-based-genetic algorithm (TBGA) is used in an adaptive neuro-fuzzy inference system (ANFIS) to optimize design parameters for surface acoustic wave (SAW) gas sensors. The Taguchi method is used to reduce the number of experiments and collect performance data for an SAW gas sensor. The TBGA has two optimization roles. In the ANFIS, the TBGA selects appropriate membership functions and optimizes both the premise and the consequent parameters by minimizing the performance criterion of the root mean squared error. Another role of the TBGA is optimizing design parameters for an SAW gas sensor. Simulated experimental application of the proposed TBGA-based ANFIS approach showed that, in terms of both resonant frequency shift and precision performance, this systematic design approach obtains far superior results compared with the conventional trial-and-error design methods and other Taguchi-based design methods.
关键词： Adaptive network fuzzy inference system,Taguchi-genetic algorithm,surface acoustic wave (SAW) gas sensors
更新于2025-09-19 17:13:59
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[IEEE 2019 Photonics & Electromagnetics Research Symposium - Fall (PIERS - Fall) - Xiamen, China (2019.12.17-2019.12.20)] 2019 Photonics & Electromagnetics Research Symposium - Fall (PIERS - Fall) - A Wideband Fabry-Perot Antenna with Low-RCS High-GBP Using Embed-chessboard Polarization Conversion Metasurface
摘要： An improved adaptive neuro-fuzzy inference system (IANFIS) is proposed to build a model to predict the resonant frequency shift performance of surface acoustic wave (SAW) gas sensors. In the proposed IANFIS, by directly minimizing the root-mean-squared-error performance criterion, Taguchi-genetic learning algorithm is used in the ANFIS to find both the optimal premise and consequent parameters and to simultaneously determine the most suitable membership functions. The five design parameters of SAW gas sensors are considered to be the input variables of the IANFIS model. The input variables include the number of electrode finger pairs, the electrode overlap, the separation distance of two interdigital transducers on the substrate, the dimensions of the stable temperature-cut (ST-cut) quartz substrate, and the electrode thickness. The output variable of the IANFIS model is composed of the resonant frequency shift performance. The results predicted by the proposed IANFIS are compared with those obtained by the back-propagation neural network. The comparison has shown that the performance prediction of resonant frequency shift using the proposed IANFIS is effective. In addition, the sensitivity analyses of the five design parameters have also shown that both the electrode overlap and the dimensions of the ST-cut quartz substrate have the most influence on the resonant frequency shift performance.
关键词： Adaptive neuro-fuzzy inference system,surface acoustic wave (SAW) gas sensors,Taguchi-genetic learning algorithm
更新于2025-09-19 17:13:59
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[IEEE 2019 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) - Saint-Petersburg, Russia (2019.6.3-2019.6.7)] 2019 Wave Electronics and its Application in Information and Telecommunication Systems (WECONF) - Generation of Surface Acoustic Waves During Interband Absorption of Laser Radiation in a BSO-ZnO Structure
摘要： An experimental investigation of laser-stimulated generation of surface acoustic waves in a piezoelectric-semiconductor structure has been carried out. In article present the results of investigation the structure, optics properties thin film ZnO and acoustoelectronic properties of a thin-film structure containing bismuth silicate and a ZnO semiconductor.
关键词： photorefractive material,acoustooptics,radiophotonics,acoustoelectronics,bismuth silicate,zinc oxide,surface acoustic wave,laser-stimulated generation of acoustic waves
更新于2025-09-12 10:27:22
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Surface acoustic wave-based ultraviolet photodetectors: a review
摘要： Over the past decade, ultraviolet (UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave (SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators (FBARs) and Lamb wave resonators (LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field.
关键词： ultraviolet detector,sensitive material,surface acoustic wave,piezoelectric
更新于2025-09-12 10:27:22
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Analysis of velocity calculation methods of laser-induced surface acoustic wave
摘要： The key to measuring residual stress by surface acoustic wave method is the accurate measurement of velocity. In this paper, the velocity of laser-induced broadband surface acoustic wave is studied, and three velocity calculation methods of surface acoustic wave, time domain method, phase method and wavelet method are compared. The calculation error of the time domain method under the condition of dispersion is analyzed. A recursive method for calculating phase difference is proposed to improve the efficiency of phase method. The simulated surface acoustic waves are used to compare the phase method and wavelet method under the conditions of attenuation and dispersion. Compared with the wavelet method, the phase method cannot distinguish the time when the frequency band appears, and the velocity calculation of adjacent frequency points is related, while the wavelet method is independent of each other. The wavelet method can improve the calculation accuracy of the velocity curve by interpolating the original data. After interpolation, the trend of curve is more obvious, and the fitting error is greatly reduced.
关键词： Wavelet,Dispersion,Comparative analysis,Surface acoustic wave,Wave velocity
更新于2025-09-11 14:15:04
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Experimental Investigation of Surface Acoustic Wave Acoustoelectric Effect using a Graphene Film on Lithium Niobate
摘要： Experimental results of the measured surface acoustic wave (SAW) acoustoelectric effect (AE) using single-layer thin-film graphene on 128°, Y-cut, and X-propagating lithium niobate (128-LN) are presented. The use of an AE amplifier in SAW communication devices, especially in gigahertz bands, could make fundamental advancements in radios, sensors, and other applications. Experimental results at 1350 MHz show the delay line asymmetry of 3 dB, given as the ratio of the forward versus reverse peak SAW frequency response, with an applied dc voltage on the graphene film.
关键词： surface acoustic wave (SAW),Piezoelectric effect,surface acoustic wave (SAW) filters
更新于2025-09-10 09:29:36
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Frequency response study of surface acoustic wave devices with SiO <i> <sub/>x</sub></i> N <i> <sub/>y</sub></i> film using LiTaO <sub/>3</sub> substrate
摘要： In an attempt to suppress the frequency variation of a surface acoustic wave device caused by dielectric ?lm deposition on an interdigital transducer (IDT) electrode, we fabricated a one-port resonator and examined the correlation with frequency response and refractive index when a SiOxNy ?lm is deposited. Our data showed that the resonator frequency changes as the refractive index of the SiOxNy ?lm changes. We also found that the frequency drift caused by the SiOxNy deposition can be suppressed if the refractive index is kept in a certain range. Then, we performed a ?nite element method spectral domain analysis to calculate frequency response using the Young’s modulus obtained in this experiment. The calculated frequency response indicated that the refractive index of the SiOxNy ?lm needs to be altered in accordance with the IDT electrode thickness. We suggest that one of the e?ective ways of controlling the frequency response is to manage the refractive index of SiOxNy.
关键词： SiOxNy ?lm,frequency response,refractive index,IDT electrode,surface acoustic wave device
更新于2025-09-10 09:29:36
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Nano- and submicro-sized three-dimensional shape measuring system using a SAW-based capacitance sensor
摘要： SAW-based capacitance sensors were developed by measuring the changes in the voltage ratio between an output inter-digital transducer (IDT) and an input IDT, induced by the variation in the capacitance between hemi-spherical conductive tips with diameters on the order of micrometers. We derived the transfer and sensitivity functions, which describes the ratio of the variation in the output voltage to the variation in the input voltage with a 2-port network model of a SAW based on Mason’s equivalent electro-acoustic circuit and analytical model for the apex capacitance. We then conducted an experiment to verify and measure the transfer function and the 3-D shape. The system was found to have an average resolution of approximately 10 nanometers. We also used the constructed system to measure nano- and submicro-sized 3-D shapes, and verified that the measurement results were accurate.
关键词： Surface acoustic wave,Capacitance sensor,Transfer function,Sensitivity function,Submicro-sized 3-D shape
更新于2025-09-10 09:29:36
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High Frequency Surface Acoustic Wave Devices Based on ZnO/SiC Layered Structure
摘要： In this work, highly (0002) oriented ZnO piezoelectric films were deposited on high acoustic velocity SiC substrates. Surface acoustic wave (SAW) devices on ZnO/SiC layered structure operating in the fundamental mode with high frequency to 7 GHz range were successfully fabricated for the first time. The comprehensive experimental and theoretical investigations about phase velocities Vp, the electromechanical coupling coefficients K2 and quality factors Q of one-port SAW resonators have been studied considering various ZnO normalized thickness h/λ. The resonators with large K2 and high Q are implemented over 5–7 GHz demonstrating K2 of 0.47%–2.83% and Q of 149–549. Specifically, a high K2 of 2.83% and large Q of 549 are simultaneously achievable for the resonator at 5.19 GHz. Finally, with the high Vp of ZnO/SiC structure being up to 6800 m/s at h/λ=0.14, a 6.8 GHz SAW filter was achieved. Our work shows ZnO/SiC structure is of great potential for high frequency SAW devices application.
关键词： high frequency,SiC,Surface acoustic wave,ZnO
更新于2025-09-10 09:29:36
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Flexible dual-mode SAW strain sensor based on crystalline LiNbO3 thin film
摘要： This work presents the development of flexible dual-mode surface acoustic wave (SAW) sensor based on single crystalline thin film lithium niobate (TF-LN). Numerical modeling is conducted to investigate the SAW propagation and the effects on strain sensitivity. The dependence of strain sensitivity on angles between the applied strain and SAW propagation direction is analyzed numerically and experimentally, showing that the maximum strain sensitivity is at 45° rather than longitudinal direction. 128° Y-cut TF-LN (~50 μm), obtained by micromachining technique, is utilized as the piezoelectric substrate to fabricate the SAW strain sensors with dual mode, namely Rayleigh mode and thickness shear mode (TSM). The sensor has excellent flexibility and demonstrates remarkable capability for an ultra-wide range strain measurement up to ±3000 με. Temperature effects on resonant frequency and strain sensitivity are investigated in the range of 25 ~ 100 ℃, and similar temperature characteristics are observed for the dual modes. A method of beat frequency between the dual modes is introduced which is able to eliminate the temperature effect on strain sensing, an on-chip temperature influence removing capability. All the results clearly show that this sensor exhibits great potential for applications in flexible electronics and microsystems.
关键词： dual-mode,temperature cancellation,flexible strain sensor,LiNbO3 thin film,surface acoustic wave
更新于2025-09-09 09:28:46