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oe1(光电查) - 科学论文

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  • [IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Fabrication of Cavity-Sealed Optical Interferometric Surface Stress Biosensor by thin Film Transfer Technique

    摘要： We developed a surface stress sensor based on a MEMS Fabry-Perot interferometer with cavity-sealed structure by technique of nanometer-thick parylene sheet for highly sensitive label-free biosensing. The proposed MEMS interferometer can measure the membrane deflection caused by target molecule adsorption as the spectral shift. The proposed cavity-sealed optical interferometer can prevent physical adsorption to the backside of membrane and refractive index drift in the cavity, leading to improvement of sensitivity. We successfully obtained the spectral shift of 77 nm in 10 minutes with the color change associated with the antigen-antibody reaction with a concentration of 1 ng/ml, which improved by 16.7-fold compared with the conventional sensor.

    关键词： MEMS biosensor,Surface stress sensor,label-free biosensing,film transfer technique,Fabry-Perot interferometer

    更新于2025-09-16 10:30:52

  • Sandwich-type Surface Stress Biosensor Based on Self-Assembled Gold Nanoparticles in PDMS Film for BSA Detection

    摘要： Polydimethylsiloxane (PDMS) films compositing with gold nanomaterials have drawn increasing interest for their application in biosensors. However, gold and PDMS exhibit poor compatibility, limiting their sensitivity in biosensing. Herein, we reported a surface stress biosensor based on a gold nanoparticle–PDMS (AuNP–PDMS) composite film to detect bovine serum albumin (BSA). The AuNP–PDMS film was fabricated by in-situ reduction of PDMS and further reduction of glucose. The compatibility between gold and PDMS was improved via two-step reduction of AuNPs. The surface stress biosensor can specifically detect BSA molecules within 0–50 μg/mL concentration range by using the direct assay and the sandwich assay. The sandwich assay amplified the surface stress and reduced the limit of detection to 0.035 μg/mL, which is lower than that achieved by the direct assay. The sandwich-type biosensor also exhibits stability, repeatability and specificity. This study is expected to drive the development of new methods for biomolecule detection.

    关键词： surface stress biosensor,BSA detection,self-assembly AuNPs,sandwich assay

    更新于2025-09-11 14:15:04

  • Handbook of Mechanics of Materials || Surface/Interface Stress and Thin Film Stress

    摘要： Thin ?lm stress is critical for the reliability and electronic/optoelectronic properties of thin ?lm devices. In this chapter, we systematically discussed the effects of surface and interface stresses on the ?lm stress development during growth of polycrystalline ?lms at the initial and ?nal growth stage. We demonstrate that surface stress plays an important role at the initial stage of ?lm growth (island growth stage), and conventional stress analysis technology such as wafer curveture experiments may not be applicable at this stage. At the late stage of ?lm growth, we also show that adatom insertion into the grain boundaries is the primary mechanism of compressive stress development.

    关键词： interface stress,Thin ?lm stress,adatom insertion,wafer curvature,grain boundaries,surface stress,polycrystalline ?lms

    更新于2025-09-10 09:29:36

  • Approximate and explicit expression of optical forces and pull-in instability of a silicon nano-optomechanical device

    摘要： Nano-optomechanical systems actuated by optical forces enable many interesting scientific and technological applications. They are vulnerable to the effects of surface stress and Casimir forces. Therefore, calculation of optical forces is essential for the reliability applications of these advanced devices. In this paper, an approximate and explicit expression is developed for the evaluation of the optical force existing between a waveguide and a substrate through the effective refractive index. The influences of surface stress and Casimir forces on the pull-in instability of a silicon nano-optomechanical device actuated by optical forces are investigated. It is found that if neglecting the effect of surface stress, the maximum size, which indicates the device can be safely fabricated, will be over-predicted. The surface stress reduces the critical optical power and its effect is more significant for a slender waveguide.

    关键词： surface stress,pull-in instability,Casimir forces,optical force,Nano-optomechanical device

    更新于2025-09-09 09:28:46