研究目的
To develop a highly sensitive label-free biosensor based on a MEMS Fabry-Perot interferometer with a cavity-sealed structure to measure membrane deflection caused by target molecule adsorption as spectral shift, improving sensitivity by preventing physical adsorption and refractive index drift.
研究成果
The cavity-sealed interferometric biosensor demonstrated significant improvement in sensitivity, capable of detecting target molecules at 1 ng/ml concentration through colorimetric changes, suggesting potential for detecting even lower concentrations.
研究不足
The study focuses on improving sensitivity through structural and material modifications but does not extensively explore the sensor's performance across a wide range of biomolecules or environmental conditions.
1：Experimental Design and Method Selection:
The study designed a cavity-sealed Fabry-Perot interferometer using a nanometer-thick parylene sheet for biosensing. The methodology included optical analysis and finite element method for sensor response prediction.
2：Sample Selection and Data Sources:
The sensor's response was tested with BSA antigen-antibody reactions at concentrations as low as 1 ng/ml.
3：List of Experimental Equipment and Materials:
Included parylene-C for membrane, PMMA for molecular binding layer, and Micro-90 surfactant for wafer bonding.
4：Experimental Procedures and Operational Workflow:
Fabrication involved thermal bonding of parylene layers, UV/O3 treatment for PMMA oxidation, and antibody immobilization via cross-linking agents.
5：Data Analysis Methods:
Spectral shifts were measured to quantify membrane deflection, with surface stress calculated using finite element method.
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