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oe1(光电查) - 科学论文

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出版时间
  • 2018
研究主题
  • Multi-input and multi-output
  • half adder
  • DEMUX
  • electrostatic and electrothermal actuation
  • MEMS resonators
应用领域
  • Optoelectronic Information Science and Engineering
机构单位
  • King Abdullah University of Science and Technology
120 条数据
?? 中文（中国） ▾

  • [IEEE 2018 International Conference on Optical MEMS and Nanophotonics (OMN) - Lausanne (2018.7.29-2018.8.2)] 2018 International Conference on Optical MEMS and Nanophotonics (OMN) - Selective Infiltration Damping of MEMS Scanning Mirrors

    摘要： Quasi-static MEMS scanning mirrors are used for optical beam steering on arbitrary trajectories. They have to provide a broad mechanical bandwidth depending on the desired speed. In this work an approach by passive damping of the MEMS mirrors with gel droplets is described, that allows to increase the usable bandwidth. In order to achieve this, a dielectric gel is dispensed into the mirrors' structure. The appropriate infiltration method is presented. Static and dynamic properties such as maximum tilt angle and frequency response are investigated. Furthermore the reduction of parasitic effects like the coupling of the two axes of the mirror is discussed.

    关键词： damping,frequency response,viscoelastic gel,scanning mirror,MEMS

    更新于2025-09-23 15:21:01

  • A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

    摘要： Micro-opto-electro-mechanical (MOEMS) micromirrors are an enabling technology for mobile image projectors (pico-projectors). Low size and low power are the crucial pico-projector constraints. In this work, we present a fast method for the optimization of a silicon single-axis electromagnetic torsional micromirror. In this device, external permanent magnets provide the required magnetic field, and the actuation torque is generated on a rectangular multi-loop coil microfabricated on the mirror plate. Multiple constraints link the required current through the coil, its area occupancy, the operating frequency, mirror suspension length, and magnets size. With only rather general assumptions about the magnetic field distribution and mechanical behavior, we show that a fully analytical description of the mirror electromagnetic and mechanical behavior is possible, so that the optimization targets (the assembly size, comprising the mirror and magnets, and the actuation current) can be expressed as closed functions of the design parameters. Standard multiobjective optimization algorithms can then be used for extremely fast evaluation of the trade-offs among the various optimization targets and exploration of the Pareto frontier. The error caused by model assumptions are estimated by Finite Element Method (FEM) simulations to be below a few percent points from the exact solution.

    关键词： MOEMS,micromirrors,magnetic actuation,pico-projectors,Micro-electro-mechanical systems (MEMS),multiobjective optimization

    更新于2025-09-23 15:21:01

  • Nano- and Microfabrication for Industrial and Biomedical Applications || Micromechanical transducers

    摘要： Miniaturized micromechanical-based transducers are applied in many various scientific communities and industries. In this chapter we look into the basic concepts of this extensive and important category of devices using simple components as examples. Transducers come in such extreme diversity that a descriptive overview such as is provided by this book is best taken from the perspective of the user. One of the most easily understood definitions of transducers is that they convert energy from one form into another. This perspective also shows that there is no one single design rule. The designer needs to start from a range of actual conditions to realize the required transduction principle in a given application.

    关键词： microfabrication,MEMS,Micromechanical transducers,actuators,sensors

    更新于2025-09-23 15:21:01

  • Strain Effect in Highly-Doped n-Type 3C-SiC-on-Glass Substrate for Mechanical Sensors and Mobility Enhancement

    摘要： This work reports the strain effect on the electrical properties of highly doped n-type single crystalline cubic silicon carbide (3C-SiC) transferred onto a 6-inch glass substrate employing an anodic bonding technique. The experimental data shows high gauge factors of (cid:1)8.6 in longitudinal direction and 10.5 in transverse direction along the [100] orientation. The piezoresistive effect in the highly doped 3C-SiC film also exhibits an excellent linearity and consistent reproducibility after several bending cycles. The experimental result is in good agreement with the theoretical analysis based on the phenomenon of electron transfer between many valleys in the conduction band of n-type 3C-SiC. Our finding for the large gauge factor in n-type 3C-SiC coupled with the elimination of the current leak to the insulated substrate could pave the way for the development of single crystal SiC-on-glass based MEMS applications.

    关键词： piezoresistance,wafer bonding,silicon carbide,MEMS,strain engineering

    更新于2025-09-23 15:21:01

  • [IEEE 2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL) - Sozopol, Bulgaria (2019.9.6-2019.9.8)] 2019 IEEE 8th International Conference on Advanced Optoelectronics and Lasers (CAOL) - Improving Focusing Properties of Gradient Annular Metal Gratings of Terahertz Range

    摘要： We report the design, fabrication, and experimental characterization of dense, monolithic, and planar arrays of externally-fed electrospray emitters with an integrated extractor grid and carbon nanotube ?ow control structures for low-voltage and high-throughput electrospray of the ionic liquid EMI-BF4 in vacuum. Microfabricated arrays with as many as 1900 emitters in 1 cm2 were fabricated and tested. Per-emitter currents as high as 5 μA in both polarities were measured, with start-up bias voltages as low as 470 V and extractor grid transmission as high as 80%. Maximum array emission currents of 1.35 mA (1.35 mA/cm2) were measured using arrays of 1900 emitters in 1 cm2. A conformal carbon nanotube forest grown on the surface of the emitters acts as a wicking structure that transports liquid to the emitter tips, providing hydraulic impedance to regulate and uniformize the emission across the array. Mass spectrometry of the electrospray beam con?rms that emission in both polarities is composed of solvated ions, and etching of the silicon collector electrode is observed. Collector imprints and per-emitter current–voltage characteristics for different emitter array sizes spanning three orders of magnitude show excellent emission uniformity across the array. Performance estimates of the devices as nanosatellite thrusters are provided.

    关键词： Electrospray,carbon nanotubes,ionic liquid,MEMS,multiplexing,microfabrication

    更新于2025-09-23 15:19:57

  • [IEEE 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Daejeon, Korea (South) (2019.7.28-2019.8.1)] 2019 International Conference on Optical MEMS and Nanophotonics (OMN) - Fast switching via frustrated total internal reflection in silicon photonics MEMS-actuated waveguides

    摘要： We present a switching concept based on total internal reflection (TIR) and frustrated-TIR (F-TIR) using a MEMS movable waveguide fully compatible with silicon photonics technology. The switching element allows implementing large-scale photonic switches.

    关键词： MEMS switch,silicon photonics,Optical Switching,data center networking

    更新于2025-09-23 15:19:57

  • Parameter Studies of Ceramic MEMS Microhotplates Fabricated by Laser Micromilling Technology

    摘要： This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration of flexible opportunities for new fabrication process flows based on laser micromilling tech; modeling of power consumption MEMS microhotplate depending on the thickness and topology; demonstration of necessity changing thick film technology of metallization to vacuum sputtering by reducing of power consumption. The results show possibility to fast fabrication of different topologies for ceramic MEMS microhotplate in form-factor of SOT-23 type SMD package.

    关键词： thick film technology,modeling,microhotplate,MEMS,ceramic

    更新于2025-09-23 15:19:57

  • [IEEE 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) - Chicago, IL, USA (2019.6.16-2019.6.21)] 2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) - Ultralight Luminescent Solar Concentrators for Space Solar Power Systems

    摘要： This paper reports the design, fabrication, and characterization of arrays of miniaturized, internally fed, polymer electrospray emitters fabricated with stereolithography. The freeform additive manufacturing process used to make the devices has associated two orders of magnitude reduction in the fabrication cost per device and fabrication time (from thousands of dollars to tens of dollars, and from months to hours, respectively) and a two orders of magnitude reduction in the cost of the manufacturing infrastructure (from millions of dollars to tens of thousands of dollars) compared with a silicon MEMS multiplexed electrospray source. The 3-D printed devices include features not easily attainable with other microfabrication methods, e.g., tapered channels and threaded holes. Through the optimization of the fabrication process 10-mm tall, isolated, straight, solid columns with diameter as small as 300 μm, and 12-mm long, straight tubes with inner diameter as small as 400 μm and wall thickness as small as 150 μm were demonstrated. Arrays with as many as 236 internally fed electrospray emitters (236 emitters in 1 cm2) were made, i.e., a twofold increase in emitter density and a sixfold increase in array size compared with the best reported values from multiplexed, internally fed, electrospray sources made of polymer. The characterization of devices with a different array size suggests a uniform emitter operation.

    关键词： Additive manufacturing of MEMS,multiplexed liquid ionizers,electrospray,stereolithography

    更新于2025-09-23 15:19:57

  • Heterodyne interferometry at ultra-high frequencies with frequency-offset-locked semiconductor lasers

    摘要： Modern broadband telecommunications require microelectromechanical filters which mechanically vibrate at ultra-high frequencies up to several gigahertz. Heterodyne interferometers, so-called laser-Doppler vibrometers (LDVs), provide a sensitive and contactless measurement technique for vibrations in such filters, but are limited in GHz heterodyning by the efficiency drop of acousto-optic frequency shifting. Heterodyning by frequency-offset locking of two lasers in an optoelectronic phase-locked loop (OPLL) overcomes this limitation. This is demonstrated with our LDV setup with heterodyning up to 1.4 GHz via offset locking of two semiconductor lasers at visible wavelength. The experiments show a vibration-amplitude resolution of less than 1 pm Hz for frequencies higher than 50 MHz up to 700 MHz. The bandwidth is only per limited by our photodetectors. This amplitude resolution already qualifies our LDV for vibration measurement of microelectromechanical filters at ultra-high frequencies. We present a comprehensive model for the vibration-amplitude resolution of a LDV with this technique including the laser linewidths, the OPLL transfer function, and interferometer delays. The experiments with our LDV validate the model predictions from numerical simulations. Finally, we discuss the collapse of the heterodyne carrier at vanishing mutual coherence due to interferometer delays, the transition to shot-noise-limited detection, and provide design recommendations.

    关键词： MEMS testing,Vibration measurement,Optical phase-locked loop,Heterodyne interferometry

    更新于2025-09-23 15:19:57

  • [IEEE 2018 Asia Communications and Photonics Conference (ACP) - Hangzhou (2018.10.26-2018.10.29)] 2018 Asia Communications and Photonics Conference (ACP) - Reducing the RF linewidth and timing jitter of a mode-locked semiconductor laser using optical feedback scheme

    摘要： This paper reports the design, fabrication, and characterization of arrays of miniaturized, internally fed, polymer electrospray emitters fabricated with stereolithography. The freeform additive manufacturing process used to make the devices has associated two orders of magnitude reduction in the fabrication cost per device and fabrication time (from thousands of dollars to tens of dollars, and from months to hours, respectively) and a two orders of magnitude reduction in the cost of the manufacturing infrastructure (from millions of dollars to tens of thousands of dollars) compared with a silicon MEMS multiplexed electrospray source. The 3-D printed devices include features not easily attainable with other microfabrication methods, e.g., tapered channels and threaded holes. Through the optimization of the fabrication process 10-mm tall, isolated, straight, solid columns with diameter as small as 300 μm, and 12-mm long, straight tubes with inner diameter as small as 400 μm and wall thickness as small as 150 μm were demonstrated. Arrays with as many as 236 internally fed electrospray emitters (236 emitters in 1 cm2) were made, i.e., a twofold increase in emitter density and a sixfold increase in array size compared with the best reported values from multiplexed, internally fed, electrospray sources made of polymer. The characterization of devices with a different array size suggests a uniform emitter operation.

    关键词： stereolithography,Additive manufacturing of MEMS,electrospray,multiplexed liquid ionizers

    更新于2025-09-23 15:19:57