研究目的
To introduce the field of micromechanical sensors and actuators and their technical applications, focusing on selected microfabrication technologies and their applications.
研究成果
The chapter concludes by emphasizing the importance of integrating skills and technologies from different scientific disciplines onto one chip for the development of micromechanical transducers. It highlights the need for continuous development in defining and shaping novel materials to meet the demands of new application fields.
研究不足
The field of micromechanical transducers is too extensive to discuss details of engineering design and the theoretical background of sensors and actuators within the context of this book. The chapter focuses on selected microfabrication technologies and their applications, leaving out comprehensive coverage of all possible materials and designs.
