研究目的
Investigating the effects of damping by infiltration with gel droplets on MEMS scanning mirrors to increase the usable bandwidth.
研究成果
The selective infiltration of dielectric gel droplets into MEMS scanning mirrors significantly reduces the quality factor and increases the usable bandwidth. This method also reduces the coupling between the scanning axes, enhancing beam steering precision. The approach maintains the maximum mechanical tilt angle with only a slight decrease, making it suitable for applications requiring broad mechanical bandwidth.
研究不足
The study focuses on quasi-static MEMS scanning mirrors and the specific method of damping with gel droplets. The applicability to other types of MEMS devices or damping methods is not explored.
1：Experimental Design and Method Selection:
The study involves passive damping of MEMS scanning mirrors using dielectric gel droplets to increase mechanical bandwidth.
2：Sample Selection and Data Sources:
MEMS scanning mirrors fabricated by Mirrorcle Technologies Inc. (quasi-static type A7M
3：1 with 2mm diameter) are used. List of Experimental Equipment and Materials:
Tungsten needles with a tip radius of
4：6 μm for gel application, dielectric gel, and a microscope with dark-field illumination for observation. Experimental Procedures and Operational Workflow:
Gel droplets are applied into the trenches between the lever arms and the mirror substrate, with droplet size controlled by application time. The process is observed under a microscope.
5：Data Analysis Methods:
Static and dynamic properties such as maximum tilt angle and frequency response are measured and analyzed.
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