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Physical and electrical properties of nitrogen-doped hydrogenated amorphous carbon films
摘要： Nitrogen-doped hydrogenated amorphous carbon films (a-C:H:N) have been prepared by a plasma-activated chemical vapor deposition technique (PACVD) by using a plasma beam source (PBS). The properties of the a-C:H:N films were changed by varying the total pressure, the substrate temperature (100 °C, 300 °C) and nitrogen partial pressure p(N2) by adding nitrogen to the precursor acetylene (C2H2). For the investigations, a-C:H:N films have been deposited onto glass slides and doped silicon wafers. The deposition rate decreased with increasing nitrogen content in the N2/C2H2 gas mixture and with decreasing total pressure. The elemental composition of two sample series (300 °C) has been analyzed with Elastic Recoil Detection Analysis (ERDA). The highest N content and N/C ratio was estimated to be 16 at.% and 0.25 at the highest p(N2), respectively. Microhardness measurements showed that the hardness decreased with increasing p(N2). Electrical resistance of the a-C:H:N films was measured by 4-point probe. Electrically conductive coatings have been obtained by nitrogen-doped a-C:H films at higher substrate temperature (300 °C). The electrical resistance of the a-C:H:N films also decreases with decreasing total pressure, with the lowest value being about 1 Ohm cm. The film density was determined by means of X-ray reflectometry (XRR).
关键词： PACVD,carbon nitride films,electrical conductivity,DLC,carbon films,XRR
更新于2025-09-23 15:22:29
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Phase transitions and critical phenomena of tiny grains carbon films synthesized in microwave-based vapor deposition system
摘要： Different peak trends of tiny grains carbon film have been observed under the investigations of the Raman spectroscopy and energy loss spectroscopy. Carbon films known in nanocrystalline and ultrananocrystalline diamond films are synthesized by employing microwave‐based vapor deposition system. Carbon atoms exhibit several state behaviors depending on the incurred positions of their electrons. Different morphology of tiny grains under different chamber pressure is related to different rate of arriving typical energies at/near substrate surface. Those tiny grains of carbon film, which evolved in graphitic state atoms are converted to structure of smooth elements where elongation of atoms of one‐dimensional arrays is as per exerting surface format forces along opposite poles from their centers. Such tiny grains in the film are the cause of v1 peak under the investigation of the Raman spectrum because of the enhanced propagation of input laser signals through channelized inter‐state electron gaps of elongated graphitic state atoms. Those tiny grains of carbon film, which evolved in fullerene state are the cause of v2 peak. The tiny grains related to v1 peak possess a low intensity as compared with the ones which comprised atoms having state behaviors known in their exceptional hardness. Tiny grains representing v1 peak in the Raman spectrum are also the cause of field emission characteristic of a carbon film. Different peak recordings were made for the Raman at defined positions indicating a different state of carbon atoms for a different phase of deposited tiny grains, which is in line to their energy loss spectroscopy.
关键词： field emission,tiny grains carbon films,Raman spectra,phase transition,heat energy,energy loss spectroscopy
更新于2025-09-23 15:21:01
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Plasmonic Properties of Nanostructured Diamond Like Carbon/Silver Nanocomposite Films with Nanohole Arrays
摘要： Plasmonic properties of the diamond like carbon nanocomposite films with embedded silver nanoparticles with patterned nanohole arrays were analyzed in this study. The films were deposited by unbalanced reactive magnetron sputtering of silver target. Nanopatterning of the films was performed by combining electron beam nanolithography and ion beam etching techniques. Modeling of plasmonic properties was done using the classical Maxwell-Garnett theory. Modeling data and experimental results were in good accordance. Formation of the nanohole pattern in diamond like carbon films doped with silver resulted in decreased intensity of the surface plasmon resonance absorbance peak. No new absorbance or transmittance peaks were observed after the nanopattering. It was explained by extraordinary transmission effect in nanostructured DLC : Ag film films due to plasmon polariton resonance inside of the nanoholes.
关键词： plasmon polariton resonance,nanohole array,diamond like carbon films
更新于2025-09-12 10:27:22
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Microcontact Printing with Laser Direct Writing Carbonization for Facile Fabrication of Carbon‐Based Ultrathin Disk Arrays and Ordered Holey Films
摘要： A nanometer-thick carbon film with a highly ordered pattern structure is very useful in a variety of applications. However, its large-scale, high-throughput, and low-cost fabrication is still a great challenge. Herein, microcontact printing (μCP) and direct laser writing carbonization (DLWc) are combined to develop a novel method that enables ease of fabrication of nanometer-thick and regularly patterned carbon disk arrays (CDAs) and holey carbon films (HCFs) from a pyromellitic dianhydride-oxydianiline-based polyamic acid (PAA) solution. The effect of PAA concentration and pillar lattice structure of the polydimethyl siloxane stamp are systematically studied for their influence on the geometrical parameter, surface morphology, and chemical structure of the finally achieved CDAs and HCFs. Within the PAA concentration being investigated, the averaged thickness of CDAs and HCFs can be tailored in a range from a few tens to a few hundred of nanometers. The μCP+DLWc-enabled electrically conductive CDAs and HCFs possess the characteristics of ease-of-fabrication, nanometer-thickness, highly regular and controlled patterns and structures, and the ability to form on both hard and soft substrates, which imparts usefulness in electronics, photonics, energy storage, catalysis, tissue engineering, as well as physical, chemical, and bio-sensing applications.
关键词： direct laser writing carbonization,holey carbon films,microcontact printing,carbon disk arrays
更新于2025-09-11 14:15:04
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Effect of annealing treatment on transparent and conductive hydrated magnesium-carbon films
摘要： Transparent electronic technology has many urgent optoelectronic device applications. A key component of plasmonic materials in conventional semiconductors is the wide band gap of oxide thin films. Although transparent electronic materials have been developed for visible and near-infrared wavelengths, systems incorporating mid-infrared and far-infrared spectra are difficult to achieve. In this study, hydrated magnesium-carbon films, a new type of non-oxide transparent conductive thin films with a magnesium hydroxide structure, were generated using the three-step method. After annealing treatment, larger crystals in the thin films typically exhibited superior film resistivity, with conductivity values of approximately 8.63 × 10?3 Ω m. Due to the free electron concentration was not more than 1020 cm?3, the films demonstrated excellent optical properties, with plasma wavelength values of approximately 8 mm for infrared transmittance above 70%. After annealing, due to the Moss-Burstein (M-B) effect, the visible light transmittance was greater than 85% and the optical bandgap shifted towards the blue region. In addition, the influences of the sputtering power of the carbon target on the properties of hydrated magnesium-carbon film were also discussed in this paper.
关键词： Transparent conductive films,Electrical properties,Magnetron sputtering,Hydrated magnesium-carbon films
更新于2025-09-10 09:29:36
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Effects of gas residence time of CH <sub/>4</sub> /H <sub/>2</sub> on sp <sup>2</sup> fraction of amorphous carbon films and dissociated methyl density during radical-injection plasma-enhanced chemical vapor deposition
摘要： Quadruple mass spectrometric measurements of CH3 density during radical-injection plasma-enhanced chemical vapor deposition to consider the sp2 fraction of amorphous carbon (a-C) films were performed. The sp2 fraction of the a-C films reached a minimum of 46%, where the CH3 density was maximum for a residence time of 6 ms. The sp2 fraction of the a-C films was tailored with the gaseous phase CH3 density during the deposition. This knowledge is useful for understanding the formation mechanism of bonding structures in the a-C films, which enables the precise control of their electronic properties.
关键词： CH3 density,sp2 fraction,radical-injection plasma-enhanced chemical vapor deposition,amorphous carbon films,gas residence time
更新于2025-09-04 15:30:14