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Size-Dependent Photoresponse of Germanium Nanocrystals-Metal Oxide Semiconductor Photodetector
摘要： In this article, size-dependent photoresponse characteristics and low-frequency noise behavior of high-speed germanium nanocrystals (nc-Ge) photodetector have been reported. The nc-Ge embedded in SiO2 matrix with different sizes have been synthesized by annealing the cosputtered Ge-SiO2 thin films at 800 ?C–900 ?C. It has been observed that the photoresponse of the detector increases with the increasing size of nc-Ge. The sample annealed at 900 ?C showed maximum responsivity (3.5 A/W) with the fast response time. The low-frequency noise spectral power density in the current fluctuation (SI) have been measured for the fabricated nc-Ge photodetectors, and lowest noise equivalent power (NEP) and highest detectivity (D?) have been observed in the nc-Ge detector synthesized at 900 ?C. Tunable responsivity in nc-Ge has been observed due to size-dependent light absorption, electric field-driven carrier separation, and tunneling through the oxide barriers. The transient photoresponse behavior has also been studied and the best rise time of 6.2 μs was observed for nc-Ge synthesized at 900 ?C. These results suggest that the nc-Ge are a promising contender for high-performance integrated optoelectronic devices that are fully compatible with silicon technology in terms of fabrication and thermal budget.
关键词： Detectivity,noise equivalent power (NEP),responsivity,noise spectral power,germanium nanocrystals (nc-Ge)
更新于2025-09-16 10:30:52
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[IEEE 2019 16th International Conference on Quality in Research (QIR): International Symposium on Electrical and Computer Engineering - Padang, Indonesia (2019.7.22-2019.7.24)] 2019 16th International Conference on Quality in Research (QIR): International Symposium on Electrical and Computer Engineering - Room-Temperature Terahertz Antenna-Coupled Microbolometers with Titanium Thermistor and Heater
摘要： High-detectivity room-temperature terahertz (THz) detectors are expected to be utilized in spectroscopy and imaging for such applications as nondestructive inspection for safety, construction, noninvasive examination for medicine and pharmacy. We have studied THz antenna-coupled bolometers with titanium (Ti) thermistor and heater fabricated on a high-resistivity silicon (Si) substrate with MEMS structures in order to develop uncooled high-performance sensors. In this paper, we report the study on design, electromagnetic (EM) and thermal simulation, fabrication, experiment of THz-wave measurement, and evaluation of performance for single-detector devices, by which large THz array detectors are easily developed. We have achieved good performance as low noise-equivalent power (NEP) of the orders of 10-11 W/Hz1/2 and response frequency of 5.5 kHz by studying a Ti thermistor with thin meander line for the THz antenna-coupled bolometer.
关键词： nondestructive,terahertz (THz),meander line,sensing,thermistor,noise equivalent power (NEP),temperature coefficient of resistance (TCR),responsivity,bolometer,room temperature,uncooled,detector,array
更新于2025-09-16 10:30:52