研究目的
Developing high-detectivity room-temperature terahertz (THz) detectors for applications in spectroscopy, imaging, nondestructive inspection, and noninvasive examination.
研究成果
The THz antenna-coupled bolometer with a Ti meander-line thermistor demonstrated improved responsivity by 4-times and NEP by 2.5-times compared to previous detectors. The study confirms the potential for developing high-performance, room-temperature THz detectors with further advancements in detectivity and response speed.
研究不足
The study is limited by the current performance of room-temperature THz detectors, which have lower detectivity and slower response speed compared to cooled detectors and heterodyne mixers. Further improvements in detectivity (NEP) and response speed are needed through impedance matching of the heater resistance, enhancement of TCR, and enlargement of resistance of the thermistor.
1：Experimental Design and Method Selection:
The study involved designing THz antenna-coupled bolometers with titanium (Ti) thermistor and heater on a high-resistivity silicon (Si) substrate with MEMS structures. Electromagnetic (EM) and thermal simulations were conducted to analyze the performance.
2：Sample Selection and Data Sources:
The samples were fabricated using electron beam (EB) lithography process, focusing on Ti thin films and narrow lines for thermistors and heaters.
3：List of Experimental Equipment and Materials:
High-resistivity Si substrate, Ti for thermistor and heater, gold (Au) for antenna, and SiO2 insulator were used. Equipment included a 1-THz Schottky-diode multiplier source and an optical chopper for measurements.
4：Experimental Procedures and Operational Workflow:
The fabrication process involved EB lithography for all lithographic steps. Electrical experiments measured resistivity, TCR, thermal conductance, noise, and electrical responsivity. THz-wave measurement was conducted to evaluate performance.
5：Data Analysis Methods:
The performance was evaluated based on responsivity and noise-equivalent power (NEP), with theoretical analysis supported by EM and thermal simulation results.
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