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Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition
摘要： Monoclinic hafnia (m-HfO2) films were prepared on polycrystalline AlN substrates via thermal and laser chemical vapor deposition (thermal CVD and laser CVD). Highly self-oriented growth of (020) and (002) m-HfO2 films was demonstrated at a high deposition rate. Films prepared using thermal CVD exhibited a porous microstructure and no preferred orientation, whereas those prepared using laser CVD exhibited significant proportions of (020) and (002)-oriented m-HfO2. The (020) and (002) orientations were observed to be as high as 90% and 98%, respectively. The (002)-oriented m-HfO2 film exhibited a columnar structure with a feather-like texture in cross-section, and with a pyramidal faceted surface. Deposition rates of the (002)-oriented m-HfO2 films reached 67 μm h?1, approximately 40 times greater than previously reported, thermal-CVD-grown m-HfO2 films.
关键词： Films,Chemical vapor deposition,Oriented growth,Monoclinic HfO2
更新于2025-09-12 10:27:22
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[SpringerBriefs in Materials] Anisotropic Metal Chalcogenide Nanomaterials (Synthesis, Assembly, and Applications) || Conclusion and Perspectives
摘要： This brief presented an overview of syntheses and applications of anisotropic MC nanomaterials. Tuning the morphologies of MC nanomaterials is categorized into four different routes: intrinsic growth, shape-guiding agent growth, oriented growth, and chemical transformation. Assembly of the pre-formed anisotropic MC nanomaterials widens their application by building up thin layer or superstructures. In addition, compositional variations in MC nanomaterials has been leading to a variety of applications, which can be further developed into new and unexplored morphologies in the near future.
关键词： chemical transformation,morphologies,anisotropic MC nanomaterials,oriented growth,syntheses,intrinsic growth,shape-guiding agent growth,applications
更新于2025-09-04 15:30:14