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Ultracompact Camera Pixel with Integrated Plasmonic Color Filters

DOI:10.1002/adom.201900893 期刊:Advanced Optical Materials 出版年份:2019 更新时间:2025-09-11 14:15:04
摘要: Photodetector size imposes a fundamental limit on the amount of information that can be recorded by an image sensor. Compact, high-resolution sensors are generally preferred for portable electronic devices such as mobile phones and digital cameras, and as a result, a significant effort has been invested in improving the image quality provided by small-area image sensors. Reducing photodetector size, however, still faces challenges in implementation requiring improvements in current technology to meet the demand for ultracompact imaging systems such as cameras. An issue with a decrease in size is associated with photodetectors utilizing color filters. In most commonly used camera designs these filters are made of dyes or pigments and incompatible with the complementary metal-oxide-semiconductor fabrication process. They are, therefore, fabricated in two different technological processes and require subsequent alignment. As the pixel size decreases, the alignment of these layers becomes challenging. Furthermore, dye-based filters need to have a thickness of the order of micrometers to ensure sufficient absorption. Here a compact, low-cost color sensor is proposed and experimentally demonstrated utilizing monolithically integrated plasmonic antennas that have a nanoscale thickness and are fabricated in the same technological process with photodetector matrix.
作者: Evgeniy Panchenko,Lukas Wesemann,Daniel E. Gómez,Timothy D. James,Timothy J. Davis,Ann Roberts
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To propose and experimentally demonstrate a compact, low-cost color sensor incorporating monolithically integrated nanoscale thickness plasmonic antennas that are fabricated in the same technological process with photodetector matrix.

The utilization of plasmonic metasurfaces as color filters instead of conventional pigments permits planarization of the pixel design and avoids the necessity of additional alignment steps. It also enables scaling down the overall dimensions of the sensor to below 1 μm. The photodetectors demonstrated an ability to distinguish between different spectral bands and exhibited intrinsic polarization sensitivity. These sensors can be used as a planar nanoscale alternative to conventional color pixels in future high-resolution consumer or scientific cameras.

The responsivity of the cyan and yellow channels was lower compared to the magenta channel, possibly due to contamination at the metal–semiconductor interface. The polarization selectivity and the need for precise fabrication techniques may also limit the practical application of these sensors.

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