研究目的
To increase output power while keeping good beam quality in mid-infrared AlInAs/InGaAs/InP QCLs by using taper design of resonator.
研究成果
The convex geometry taper laser with 1.7o taper angle demonstrated the best performance, achieving the highest output power and smallest horizontal beam divergence. Non-linear taper designs showed better performance in terms of M2 and brightness parameters.
研究不足
The study focused on devices emitting at 4.5 μm with specific taper angles and shapes. The performance of devices with larger taper angles showed slight deterioration.
1：Experimental Design and Method Selection:
The study involved designing, fabricating, and characterizing mid-infrared AlInAs/InGaAs/InP QCLs with tapered waveguides. Different shapes (linear, concave, convex) and angles of taper waveguide sections were studied to optimize output beam parameters.
2：Sample Selection and Data Sources:
Devices emitting at
3：5 μm were fabricated with different taper angles and shapes. List of Experimental Equipment and Materials:
The fabrication process involved dry-etching, deep RIE-ICP etching, PECVD for Si3N4 deposition, and magnetron sputtering for contact layers.
4：Experimental Procedures and Operational Workflow:
The fabrication flow included photolithography, etching, dielectric deposition, contact layer deposition, and mounting of laser chips.
5：Data Analysis Methods:
Numerical simulations using COMSOL with Beam Propagation Method were conducted to analyze optical mode propagation.
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