研究目的
Exploring the effect of Ag thin film as a catalyst to grow gallium oxide thin film and nanowires for high power/high temperature devices and UV nano-sensors.
研究成果
Silver as a catalyst material for the growth of Ga2O3 has shown a great potential for high scale production. Oxygen solubility and diffusivity into silver is high and plays a critical role in enhancing the growth mechanism of Ga2O3. Our results could offer a simple, low-cost, and promising technique to grow thin film or nanowires for wide optoelectronics and sensing applications.
研究不足
The cost of Ga2O3 wafers is still prohibitively high and methods for the top-down and bottom-up fabrication of Ga2O3 nanostructures are still immature.
1：Experimental Design and Method Selection:
The thermal oxidation process was performed to explore the effect of silver thin film as a catalyst to enhance the growth of Ga2O
2：Sample Selection and Data Sources:
Quartz substrates were used, cleaned, and coated with Ag thin film of different thicknesses (5 nm and 300 nm).
3：List of Experimental Equipment and Materials:
Quartz substrates, Ag thin film, Lesker sputtering system, OTF-1200X-50-SL horizontal alumina tube furnace, oxygen analyzer.
4：Experimental Procedures and Operational Workflow:
Samples were heated up to 1000 °C for 60 min in a controlled stream of O2 and N2 mixture gases.
5：Data Analysis Methods:
XRD, SEM, EDS, and electrical measurements were performed to explore the growth mechanism.
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