研究目的
To improve the sensitivity of an optical waveguide microcantilever sensor by introducing a buffer into the connection of the input waveguide and optical waveguide cantilever.
研究成果
An improved optical microcantilever waveguide sensor was proposed, which introduced a buffer into the connection of the input waveguide and the cantilever to reduce the coupling loss. The results showed that the coupling efficiency and the sensitivity had obviously improved, with the sensitivity of the structure with a buffer being more than twice as high as the conventional structure.
研究不足
The study does not mention any specific limitations.
1：Experimental Design and Method Selection:
The study used the finite element method to evaluate the proposed structure and compare it with the conventional structure.
2：Sample Selection and Data Sources:
The input and output waveguide was 80 nm thick and made of silicon nitrous oxide, the optical waveguide cantilever was 90 μm long and made of silicon oxide, and the gap was 2 μm wide.
3：List of Experimental Equipment and Materials:
Not explicitly mentioned.
4：Experimental Procedures and Operational Workflow:
The study involved simulating the electric field distribution for the input waveguide and cantilever of both the conventional and improved structures with a buffer.
5：Data Analysis Methods:
The optical efficiency for different cantilever bendings was calculated, and the sensitivity was obtained using the derivative of coupling efficiency and free-end deflection.
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