研究目的
Investigating the measurement and estimation of local surface temperatures on a subject surface under irradiation of nano-microscale electron beams.
研究成果
The research demonstrated that nano-microscale e-beams can induce local surface temperatures high enough to cause vaporization and melting in various materials. TFTCs on freestanding Si3N4 windows were effective in measuring these temperatures, though with limitations due to thermal dissipation and sensor size. The findings provide valuable insights for applications involving e-beam processes and highlight the need for further development in nanoscale temperature measurement techniques.
研究不足
The study faced challenges in directly measuring extremely high local temperatures due to the limitations of contact thermal sensors and non-contact luminescence methods at nanoscale dimensions. Additionally, the small converting ratio from e-beam kinetic energy to surface heat and thermal dissipation through substrates affected measurement accuracy.
1：Experimental Design and Method Selection:
The study involved the use of high-intensity electron beams (e-beams) to investigate local surface heating effects on various materials. Techniques included transmission electron microscopy (TEM) and scanning electron microscopy (SEM) for observing morphological changes and thin film thermocouples (TFTCs) for temperature measurement.
2：Sample Selection and Data Sources:
Materials tested included Si and Au nanowires, metallic thin films (Cr, Pt, Pd), and Mg-B multilayered thin films. Samples were prepared using chemical vapor deposition (CVD), electrochemical deposition, and magnetron sputtering.
3：List of Experimental Equipment and Materials:
Equipment included a Jeol 2010F field-emission TEM, FEI QUANTA 600F SEM, magnetron sputtering system (PVD75, Kurt J. Lesker, USA), and Keithley 2400 digital multimeter.
4：Experimental Procedures and Operational Workflow:
Procedures involved irradiating samples with e-beams of varying intensities and durations, observing morphological changes, and measuring temperature changes using TFTCs. The process included sample preparation, e-beam irradiation, and post-irradiation analysis.
5：Data Analysis Methods:
Data analysis involved comparing pre- and post-irradiation sample morphologies, measuring temperature increments with TFTCs, and evaluating the converting ratio of e-beam kinetic energy to surface heat.
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