研究目的
Investigating the design and implementation of a bi-axial electromagnetically driven piezoresistively sensed scanning mirror for high-resolution projection displays.
研究成果
The study successfully demonstrates a CMOS MEMS biaxial scanning mirror capable of HD720 display resolution, with effective closed-loop control of the slow-axis motion. The integration of electromagnetic actuation and piezoresistive sensing in CMOS MEMS technology facilitates miniaturization and system integration.
研究不足
The study is limited by the fabrication process, which may result in thicker silicon than intended, affecting the resonant frequencies. The thermal effects at higher currents also impact the linearity of the angular response.
1：Experimental Design and Method Selection:
The study involves the design and fabrication of a CMOS MEMS biaxial scanning mirror with electromagnetic actuation and piezoresistive sensing for closed-loop control.
2：Sample Selection and Data Sources:
A scanning mirror chip was fabricated using a
3：35-μm two-polysilicon-four-metal (2P4M) CMOS process. List of Experimental Equipment and Materials:
Includes neodymium (NdFeB) magnets, a printed circuit board, and a scanning electron microscope for characterization.
4：Experimental Procedures and Operational Workflow:
The mirror's frequency responses were characterized in open-loop, followed by the implementation and testing of closed-loop control for the slow-axis motion.
5：Data Analysis Methods:
The performance was evaluated based on the θopt?D?fr,fast product and the ability to follow a triangular-wave trajectory in closed-loop operation.
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