摘要： In this work, CMOS compatible hybrid insulator metal insulator (HIMI) planar plasmonic waveguide based components such as, racetrack ring resonator, y-splitter, coupler and dual parabolic profile nano antenna have been proposed and investigated at 1.55 μm operating wavelength for the first time. The proposed components are analyzed at various parametric variations using CST microwave studio. The proposed racetrack ring resonator offers 153.88 nm free spectral range, 0.3232 nm FWHM and 46.57 dB extinction ratio at 0.40 μm radius and 0.49 μm separation length. Y-splitter divides equal power of 46.85% in both output arms and coupler couples till 86.5% power in coupled arm. The dual parabolic profile nano antenna offers a gain, bandwidth and efficiency of 7.99 dB, 203 THz and 84.56 % respectively. Using all the components, HIMI plasmonic integrated circuits have also been designed and investigated for on chip applications. Proposed components work very efficiently in chip scale integrated circuit. This investigation provides groundwork for future chip scale applications.