研究目的
Investigating the development of ultra high resolution display panels for digital holography, focusing on achieving a 1μm pixel pitch through two approaches: scaling down TFT-LCD technology and using phase change materials with Si CMOS backplane.
研究成果
The study successfully demonstrated the fabrication of a reflective TFT-LCD panel with 3μm pixel pitch and the development of a SLM based on phase change materials with Si CMOS backplane. The scalability of PCM materials suggests that achieving a 1μm pixel pitch is very promising. Future work includes developing novel pixel architecture to avoid further scaling down of minimum feature size and channel length.
研究不足
The main limitation is the requirement of very expensive processes and lithography tools for achieving a 1μm pixel pitch with straightforward scaling down of feature size. Additionally, the duration and temperature of heat pulses for phase change in PCM materials need careful control.