研究目的
To investigate the effects of water in contact with the workpiece surface on femtosecond laser surface processing and the types of structures that appear, with a comparison to results obtained using a picosecond laser.
研究成果
Laser processing in liquids is interesting for surface functionalization, allowing for submicron spike structures superimposed with nanostructures when using a femtosecond laser. Smaller structures are possible compared to ablation in air, though ripple structures could not be observed.
研究不足
The study acknowledges the complexity of laser pulse, liquid, and material interactions, and the challenges in process understanding due to limited compatibility of many process observation techniques with in-liquid laser processing.
1：Experimental Design and Method Selection:
The study used femtosecond and picosecond lasers for surface processing in water to observe the formation of structures.
2：Sample Selection and Data Sources:
A Si(111) wafer was used as the workpiece, cleaned with acetone before processing.
3：List of Experimental Equipment and Materials:
Femtosecond and picosecond laser systems, a process chamber with a beam entrance window, liquid inlets and outlets, and a pump for removing ablated particles and bubbles.
4：Experimental Procedures and Operational Workflow:
The workpiece was processed in water with varying laser pulse energies and numbers, with the focus position set on the workpiece surface.
5：Data Analysis Methods:
Scanning electron microscope (SEM) images were used to analyze the obtained topographies.
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