研究目的
Investigating the application of a dual-focus Spatial Light Modulator (SLM) emulated lens for faster femtosecond laser processing, aiming to achieve simultaneous efficient femtosecond laser ablation at two different locations in the sample only separated in the propagation axis.
研究成果
The study demonstrates the feasibility of simultaneous efficient femtosecond laser ablation at two different locations in the sample only separated in the propagation axis, mimicking physical dual focus lenses. This approach enables top&bottom surface ablation or simultaneous intra-volume machining at two different locations, with potential applications in high precision laser machining.
研究不足
The beam splitting approach based on SLM technology has been limited to simultaneously machine larger sample surfaces by separating the beams in the plane perpendicular to the propagation axis, which may increase the kerf width and limit precision.
1：Experimental Design and Method Selection:
The study uses a Coherent Legend, 140 fs, 1 mJ, 800 nm laser system for machining glass and Poly(methyl methacrylate) (PMMA) samples. A Hamamatsu SLM and a high NA focusing objective (NA= 0.5) are employed. The method involves displaying computer-generated holograms (CGH) on the SLM for dynamic pulse shaping.
2：5) are employed. The method involves displaying computer-generated holograms (CGH) on the SLM for dynamic pulse shaping.
Sample Selection and Data Sources:
2. Sample Selection and Data Sources: Glass and PMMA samples are used. The selection criteria focus on materials requiring high precision laser machining.
3：List of Experimental Equipment and Materials:
Coherent Legend laser system, Hamamatsu SLM, high NA focusing objective (NA= 0.5), glass and PMMA samples.
4：5), glass and PMMA samples.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The CGH is configured to adjust the distance between two focal spots, enabling top&bottom surface ablation or simultaneous intra-volume machining at two different locations. The phase information of a different blazed grating is added to each section of the CGH to separate the beams along the scanning axis.
5：Data Analysis Methods:
SEM imaging is used to analyze the machining results on PMMA and silica samples.
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