研究目的
To demonstrate the first waveguide-based bolometers on Silicon-on-Insulator (SOI) platform for mid-infrared (MIR) wavelengths, using plasmonic antennas as absorbing elements.
研究成果
The first Group IV integrated waveguide-based bolometer in MIR has been demonstrated. With a different design geometry, the sensitivity is enhanced from 0.68 %/mW to 0.80 %/mW at the 3.8 μm wavelength with 20 Hz chopper frequency. The 3-dB bandwidth is improved from 142Hz to >1kHz. These devices show great potential for use as fully group-IV waveguide-based detectors for MIR sensing applications.
研究不足
The silica layer underneath the bolometer substantially increases the thermal conductance, resulting in a mass of heat loss. The frequency response measurement is limited by a maximum chopper frequency of 1 kHz.
