研究目的
To develop a back-illuminated time-of-flight sensor using SOI CMOS technology for long-range LiDAR applications, enhancing quantum efficiency in the NIR region and achieving high-speed charge modulation.
研究成果
The developed TOF range imager with SOI-based lock-in pixels demonstrates high quantum efficiency and modulation contrast suitable for long-range outdoor LiDAR applications. Achievements include a distance measurement up to 27 m with minimal linearity error and a high QE of 55% at 940 nm.
研究不足
The study is limited by the prototype's small pixel array size (4 × 96 pixels), which may affect alignment accuracy for closer distances. Additionally, the drain terminal's floating state in the chip leads to unwanted signal charge retention, impacting performance.
1：Experimental Design and Method Selection:
The study employs a back-illuminated SOI-based four-tap lock-in pixel structure for TOF measurements, utilizing a 0.2 μm SOI CMOS technology. The design includes a fully depleted 200 μm-thick bulk silicon substrate for enhanced NIR sensitivity.
2：2 μm SOI CMOS technology. The design includes a fully depleted 200 μm-thick bulk silicon substrate for enhanced NIR sensitivity.
Sample Selection and Data Sources:
2. Sample Selection and Data Sources: A prototype TOF sensor chip with a 4 × 96 pixel array is implemented and tested. Measurements are conducted using a 930 nm short-pulse laser and a white light source box for various characterizations.
3：List of Experimental Equipment and Materials:
Equipment includes a 930 nm short-pulse laser (LDB-160B by Tama Electric Inc.), a white light source box (Kyoritsu, LB-8623), and an optical bandpass filter at 940 nm.
4：Experimental Procedures and Operational Workflow:
The chip's performance is evaluated through modulation characteristics, quantum efficiency measurements, and distance measurements up to 27 m under outdoor conditions.
5：Data Analysis Methods:
Data analysis includes calculating modulation contrast, quantum efficiency, linearity error, and range resolution from the measured signals.
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