研究目的
Investigating the formation and characteristics of proton-implanted waveguides in neodymium-doped calcium lithium niobium gallium garnet (Nd: CLNGG) crystals for integrated optical applications.
研究成果
The proton-implanted Nd: CLNGG crystal waveguide supports mode propagation and can serve as an active integrated element. The study demonstrates that reasonable adjustment of the energy and dose of the implanted ions can effectively optimize the optical properties of the waveguide.
研究不足
The study acknowledges that defects and damage are induced during the ion implantation process, which could affect the waveguide's performance. The optimal parameters for ion implantation to minimize damage while achieving desired waveguide properties require further exploration.
1：Experimental Design and Method Selection:
The study employed 400-keV proton implantation with a fluence of 8 × 1016 ions/cm2 to form a planar waveguide in the Nd: CLNGG crystal. The distributions of the energy loss and the refractive index profile were simulated using SRIM 2013 and the RCM, respectively.
2：Sample Selection and Data Sources:
A Nd: CLNGG crystal with dimensions of 10 mm × 5 mm ×
3：5 mm was selected for waveguide formation. List of Experimental Equipment and Materials:
The experiment utilized an ion-implantor of Nanaln for proton implantation, a prism coupling system, and an end-face coupling system for measurements.
4：Experimental Procedures and Operational Workflow:
After ion implantation, the guiding properties of the irradiated Nd: CLNGG crystal were measured using the prism coupling method and the end face coupling technique.
5：Data Analysis Methods:
The refractive index profile was simulated using the reflectivity calculation method (RCM), and the near-field intensity distribution was analyzed using a CCD.
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