研究目的
Investigating the diffusion of silver nanoparticles into dielectric layers during the deposition of metal-dielectric multilayers and their impact on interfacial optical absorption.
研究成果
The study demonstrates in-situ silver nanoparticle formation due to diffusion at the sputter-deposited Ag/dielectric interfaces, creating a unique nanostructure where both SPR and LSPR modes coexist. A physically realistic MG/BG EMT model successfully accounts for the optical spectra of this nanostructure, providing insights into the facile fabrication of devices with embedded nanoparticles for various applications.
研究不足
The study is limited by the assumptions inherent to the Maxwell-Garnett and Bruggeman effective medium theories, which may omit second-order effects such as enhanced coupling between adjacent nanoparticles and between nanoparticles and the metal surface roughness. Additionally, the model does not fully account for the varied silver layer thickness due to diffusion and interdiffusion at the second Ag/AlN interface.
1：Experimental Design and Method Selection:
The study involved the fabrication of AlN/Ag/AlN and SiNx/Ag/SiNx multilayers via RF magnetron sputtering to investigate the diffusion of Ag nanoparticles into the top dielectric layer and their plasmonic effects.
2：Sample Selection and Data Sources:
Samples with varying thicknesses of top AlN and Ag layers were prepared on glass and silicon substrates. Characterization techniques included SEM, STEM, ToF-SIMS, XPS, and UV-Vis spectroscopy.
3：List of Experimental Equipment and Materials:
Equipment used included an RF magnetron sputtering system, SEM, STEM, ToF-SIMS, XPS, and UV-Vis spectrophotometer. Materials included
4：99% pure Al and Ag targets, N2, Argon, and H2 gases. Experimental Procedures and Operational Workflow:
The sputtering chamber was cryogenically pumped to a base pressure of less than
5：8 E-6 Torr prior to deposition. Ag and AlN layers were deposited with controlled gas flow ratios. Post-deposition, samples were characterized using SEM, STEM, ToF-SIMS, XPS, and UV-Vis spectroscopy. Data Analysis Methods:
Data analysis involved modeling the silver concentration profile using complementary error functions and applying Maxwell-Garnett and Bruggeman effective medium theories to interpret the optical absorption spectra.
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