研究目的
Developing a novel cooperative algorithm for integrated atomic force microscope (AFM) and confocal laser scanning microscope (CLSM) to reduce scanning time and achieve higher scanning speed.
研究成果
The proposed novel cooperative algorithm for integrated AFM and CLSM significantly reduces scanning time by approximately 69.2% compared to traditional methods, achieving about 3 times faster scanning speed without substantial sacrifice in accuracy. The adaptive scanning region and variable speed scanning methods effectively minimize wasted time on non-ROI and optimize scanning speed based on sample topography.
研究不足
The scanning accuracy at regions with high scanning speed is slightly sacrificed, though still acceptable. The method's efficiency is demonstrated on specific samples (grating and arrow pattern), and its generalizability to other sample types may require further validation.
1：Experimental Design and Method Selection:
The study involves the calibration of AFM and CLSM, followed by CLSM performing a large range scan to define ROI using edge detection. AFM scan regions are then arranged based on ROI, employing adaptive scanning region and variable speed scanning methods to reduce time and increase speed.
2：Sample Selection and Data Sources:
Standard grating (TGF-11 calibration gratings) and an arrow pattern are used as samples for validation.
3：List of Experimental Equipment and Materials:
Includes AFM subsystem (Akiyama probe, TRITOR 100 SG piezoelectric scanner), CLSM subsystem (405 nm laser source, Thorlabs GVS 202 galvanometer scanner), and LTRPS subsystem (xy-axis positioning stage).
4：Experimental Procedures and Operational Workflow:
CLSM scans the sample to obtain height information, ROI is determined via Canny edge detection, AFM scans ROI with adaptive and variable speed methods, and results are merged.
5：Data Analysis Methods:
Comparison of scanning time between traditional and proposed methods, and evaluation of scanning accuracy.
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