研究目的
Investigating the determination of atomic oxygen state densities in a double inductively coupled plasma using optical emission and absorption spectroscopy and probe measurements.
研究成果
The CRM provides a comprehensive method for estimating atomic oxygen state densities in low-pressure plasmas, demonstrating reasonable trends and quantitative values. It highlights the importance of accounting for self absorption and cascading effects and identifies conditions under which simpler models or actinometry can be applied for process control. Future work should focus on benchmarking with other diagnostics to validate and refine the model.
研究不足
The study acknowledges uncertainties in cross sections and reaction rates, potential deviations of the electron energy distribution function from Maxwellian at high oxygen concentrations, and the empirical nature of the escape factor used to account for self absorption. The model's accuracy is also limited by the assumption of homogeneous density profiles and the lack of data on certain quenching rates and recombination coefficients.
1：Experimental Design and Method Selection:
The study employs a collisional radiative model (CRM) for estimating atomic oxygen state densities in Ar:O2 mixtures within a double inductively coupled plasma (DICP) system. The model integrates measurements from optical emission spectroscopy (OES), Langmuir probe (LP), multipole resonance probe (MRP), and tunable diode laser absorption spectroscopy (TDLAS).
2：Sample Selection and Data Sources:
Experiments are conducted at a pressure of 5 Pa and incident power of 500 W, with varying Ar:O2 mixtures. Data includes line intensities of atomic oxygen transitions, electron densities, electron energy distribution functions (EEDFs), and argon state densities.
3：List of Experimental Equipment and Materials:
Equipment includes a DICP system, VUV and UV/VIS/NIR spectrometers, LP, MRP, TDLAS setup, and a D2 lamp for calibration.
4：Experimental Procedures and Operational Workflow:
The CRM calculates atomic oxygen state densities by solving rate equations that account for electron impact excitation, quenching, spontaneous emission, and self absorption. Input parameters are derived from the aforementioned diagnostics.
5：Data Analysis Methods:
The model uses a nonlinear least-squares solver to approximate solutions to the rate equations, minimizing residuals between loss and generation terms for each atomic state.
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