研究目的
Investigating the method to determine the thickness of sub-400 nm active films from their spectrophotometric trace when the refractive index is previously known.
研究成果
The thickness of films for the fabrication of organic DFB lasers in the range 400-40 nm can be determined with an accuracy of about 5 nm even for films with low refractive index (1.5-1.7). The refractive index can be obtained by the spectrophotometric envelope method from a thicker film of the same material, but care must be taken when applying the method to films thinner than 80 nm because the refractive index might change.
研究不足
The method is limited by the increase of the refractive index for very thin films, making it less advisable to determine the refractive index from a thick film by the Swanepoel method for films thinner than 80 nm.
1:Experimental Design and Method Selection:
The procedure is based on comparing the experimental transmission spectrum in the transparent spectral window with that obtained by simulation.
2:Sample Selection and Data Sources:
Homogeneous films were spin-coated from toluene solutions containing the polymer and the dye on transparent FS substrates.
3:List of Experimental Equipment and Materials:
Jasco V-650 spectrophotometer, Mathematica (Wolfram Research, Inc.) program for simulation.
4:Experimental Procedures and Operational Workflow:
Measurements were taken against air at the center of the sample. The experimental data, the dispersion relation of the fused silica (FS) used as substrate, and that of the film obtained from a thick film are used as input and d is the output.
5:Data Analysis Methods:
The difference between the simulated and experimental data is evaluated in the transparent window by using the sum of absolute deviations.
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