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Sub-400 nm film thickness determination from transmission spectra in organic distributed feedback lasers fabrication

DOI:10.1016/j.tsf.2019.137580 期刊:Thin Solid Films 出版年份:2019 更新时间:2025-09-19 17:13:59
摘要: The design and fabrication of thin-film based organic optoelectronic devices require knowledge of the film optical properties. A low-cost and non-destructive method often used for optical characterization of films is the well-established spectrophotometric envelope method. However, this method is typically limited to thickness above 400 nm, a value often higher than that of the films involved in these devices. This paper studies a procedure to obtain the thickness of sub-400 nm active films from their spectrophotometric trace when the refractive index is previously known. The proposed procedure is based on comparing the experimental transmission spectrum in the transparent spectral window with that obtained by simulation. The capabilities of the proposed method are demonstrated here by its application in the fabrication of organic distributed-feedback lasers where a fine control of film thickness is important to obtain an optimized and reproducible response. Results were verified with other techniques, such as ellipsometry and profilometry. Thus, with the proposed method, film thickness can be easily determined down to 40 nm maintaining an accuracy of about 5 nm even for films with low refractive index (1.5-1.7). Different methods to determine refractive index of these films are also discussed.
作者: Víctor Bonal,José A. Quintana,Rafael Mu?oz-Mármol,José M. Villalvilla,Pedro G. Boj,María A. Díaz-García
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Investigating the method to determine the thickness of sub-400 nm active films from their spectrophotometric trace when the refractive index is previously known.

The thickness of films for the fabrication of organic DFB lasers in the range 400-40 nm can be determined with an accuracy of about 5 nm even for films with low refractive index (1.5-1.7). The refractive index can be obtained by the spectrophotometric envelope method from a thicker film of the same material, but care must be taken when applying the method to films thinner than 80 nm because the refractive index might change.

The method is limited by the increase of the refractive index for very thin films, making it less advisable to determine the refractive index from a thick film by the Swanepoel method for films thinner than 80 nm.

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