研究目的
Investigating the application of femtosecond laser micromachining to the fabrication of complex glass microdevices for high-order harmonic generation in gas, aiming to achieve accurate control of gas density inside the micrometer interaction channel and increase harmonics’ generation efficiency.
研究成果
The femtosecond laser micromachined glass microchips demonstrated efficient emission of extreme ultraviolet radiation produced by HHG, surpassing the performances of standard generation configurations based on pulsed gas-jets. The flexibility of the FLICE technique allows for the prototyping of different microchips for HHG, paving the way for future downscaling of HHG beamlines.
研究不足
The study is limited by the technical constraints of femtosecond laser micromachining and the complexity of achieving quasi phase-matching conditions in the harmonic generation process. Further optimization of the microchip geometries and gas density control is needed.
1：Experimental Design and Method Selection:
Femtosecond laser micromachining was used to fabricate glass microdevices for high-order harmonic generation (HHG) in gas. The FLICE technique was employed for the fabrication of microfluidic networks in a 3D geometry.
2：Sample Selection and Data Sources:
Fused silica samples were used for the fabrication of the microdevices. High-order harmonics were generated in gas-filled microchannels.
3：List of Experimental Equipment and Materials:
A femtosecond laser (Satsuma, Amplitude Systemes S.A.), a 63× microscope objective (LD-plan Neofluar, Zeiss), a high-resolution 3D movement system (Aerotech, ANT), and an ultrasonic bath with a 20% HF aqueous solution were used.
4：Experimental Procedures and Operational Workflow:
The laser beam was focused inside the fused silica sample, which was then moved with respect to the laser beam following the desired trajectory. After laser irradiation, the sample was immersed in an HF solution for etching.
5：Data Analysis Methods:
The gas flow through the device was modeled using Comsol Multiphysics software. The HHG spectra were acquired by a spectrometer and analyzed.
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