研究目的
Investigating the use of monolithically integrated titanium dioxide on lithium niobate optical waveguides for mid-infrared electro-optical modulation.
研究成果
The study successfully demonstrated reconfigurable mid-IR photonic circuits using monolithically integrated ToL waveguides, achieving efficient E-O modulation with a γeff of 5.9 pm/V. The optimized waveguide design and fabrication process enable low-loss optical propagation and high-speed modulation, suitable for broadband optical communication applications.
研究不足
The study is limited by the specific wavelength range (mid-IR) and materials (TiO2 and LiNbO3) used, which may not be applicable to other spectral regions or material systems. The E-O coefficient achieved is slightly lower than the theoretical maximum for LiNbO3, indicating potential for further optimization.
1：Experimental Design and Method Selection:
The study involved the design and fabrication of TiO2-on-LiNbO3 (ToL) waveguides for mid-IR photonic circuits. The methodology included finite difference method (FDM) modeling for waveguide mode simulation and optimization of TiO2 thickness for efficient E-O modulation.
2：Sample Selection and Data Sources:
A z-cut single crystalline LiNbO3 wafer was used as the substrate, with a sputtered TiO2 thin film forming the waveguide ridge. The optical properties were characterized using ATR-FTIR and SEM with EDS.
3：List of Experimental Equipment and Materials:
Equipment included a reactive RF sputtering system for TiO2 deposition, a SEM equipped with EDS for structural characterization, and a mid-IR testing station for optical and E-O characterization.
4：Experimental Procedures and Operational Workflow:
The fabrication process involved photolithography, TiO2 sputtering, and lift-off to form the waveguide structure. E-O modulation was tested by applying an electric field across the waveguide and measuring the mode intensity variation.
5：Data Analysis Methods:
The E-O coefficient was derived from the measured mode intensity variation with applied voltage, using theoretical models based on the Pockels effect.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
