研究目的
To prepare vertical graphene nanowalls/VO2 (B) composite films with superior thermal sensitivity for application in uncooled infrared detectors.
研究成果
The VGNWs/VO2 (B) composite films prepared by LPCVD exhibit superior thermal sensitivity and electrical properties, making them suitable for application in uncooled infrared detectors. The method provides a low-cost, facile pathway for the fabrication of high-performance VO2 (B) thin films.
研究不足
The study does not address the long-term stability and durability of the composite films under operational conditions.
1：Experimental Design and Method Selection
The composite films were synthesized by a low-pressure chemical vapor deposition (LPCVD) method. The VGNWs were grown on quartz substrates under Ar, H2 and CH4 plasma in a plasma enhanced chemical vapor deposition (PECVD) reactor. The VO2 (B) films were then prepared using vanadium (III) acetylacetonate as a precursor in a simple three-zone furnace.
2：Sample Selection and Data Sources
Quartz substrates were used for the growth of VGNWs. Vanadium (III) acetylacetonate was used as the precursor for VO2 (B) films.
3：List of Experimental Equipment and Materials
PECVD reactor, quartz substrates, vanadium (III) acetylacetonate, three-zone furnace, high-purity argon gas.
4：Experimental Procedures and Operational Workflow
The VGNWs were deposited on quartz substrates at 800 oC in a mixed gas of methane, hydrogen, and argon. The VO2 (B) films were then prepared by heating the precursor at 170 ℃ with the substrates at 425 ℃ for 2 hours.
5：Data Analysis Methods
The crystalline phases were characterized by XRD, morphology by SEM, chemical bonding by Raman spectroscopy, and electrical properties by a four-point probe system.
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X-ray diffractometer
D/Max 2200 V
Rigaku Co., Ltd., Japan
Characterization of the crystalline phases of the composite films.
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UV spectrophotometer
UH4150
Hitachi Co., Japan
Measurement of the optical transmittance spectra in a wavelength range from 300 nm to 2550 nm.
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PECVD reactor
Used for the growth of vertical graphene nanowalls on quartz substrates.
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Scanning electron microscopy
Magellan 400
FEI, America
Determination of the morphology and microstructure of the composite films.
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Raman spectrometer
INVIA Raman Renishaw RM 3000
Renishaw Co., UK
Recording of the Raman spectra to determine chemical bonding between various elements and compounds.
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X-ray photoelectron spectra system
ESCA 2000
VG Microtech Co., UK
Determination of the X-ray photoelectron spectra with a twin anode X-ray source.
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Four-point probe system
280SI
Four Dimensions Co., America
Characterization of the electrical properties of the composite films.
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