研究目的
To provide a solution for fabricating full-color micro-LED displays using a mixture of photo-curable acrylic and nano-organic color-conversion materials through conventional lithography technique.
研究成果
The study demonstrates the feasibility of fabricating full-color micro-LED displays using conventional lithography with photo-curable acrylic and nano-organic color-conversion materials. Despite current limitations, the approach offers a promising solution for mass production of full-color micro-LED displays with potential improvements in efficiency and material synthesis.
研究不足
The overall intensity and color-conversion efficiency are low, and the full-width of half maximum of red and green emissions is broad for use in a full-color display. The method requires improvement in the efficiency of the micro blue LED and optimization of internal quantum efficiency, extraction efficiency, current spreading, and heating reduction.
1：Experimental Design and Method Selection:
The study involves the fabrication of full-color micro-LED arrays using blue micro-LEDs and color-conversion materials. The method includes the use of conventional lithography to deposit color-conversion layers.
2：Sample Selection and Data Sources:
GaN-based LED structures grown on sapphire substrates were used. The LEDs consisted of specific layers including n-GaN, MQW active layer, and p-GaN.
3：List of Experimental Equipment and Materials:
Equipment includes inductively-coupled plasma (ICP) for etching, e-beam evaporation for electrode deposition, and spin-coating for applying photo-curable acrylic. Materials include perylene bisimide dyes for color conversion.
4：Experimental Procedures and Operational Workflow:
The process involves etching the p-GaN layer, depositing ITO as a transparent current spreading layer, and then Cr and Au as electrodes. Color-conversion layers were deposited using lithography.
5：Data Analysis Methods:
The study measured conversion efficiency, PL spectra, and EL spectra to analyze the performance of the color-conversion layers.
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